3D integration technologies for emerging microsystems

D Choudhury - 2010 IEEE MTT-S international microwave …, 2010 - ieeexplore.ieee.org
The next generation of small form factor (SFF) microsystem technologies can only keep up
with increased functionality and performance demands by using the third dimension. 3D …

Low-cost thin glass interposers as a superior alternative to silicon and organic interposers for packaging of 3-D ICs

V Sukumaran, T Bandyopadhyay… - IEEE Transactions …, 2012 - ieeexplore.ieee.org
Interconnecting integrated circuits (ICs) and 3-D-ICs to the system board (printed circuit
board) are currently achieved using organic or silicon-based interposers. Organic …

Through-package-via formation and metallization of glass interposers

V Sukumaran, Q Chen, F Liu… - 2010 Proceedings …, 2010 - ieeexplore.ieee.org
Interposer technology has evolved from ceramic to organic materials and most recently to
silicon. Organic substrates exhibit poor dimensional stability, thus requiring large capture …

Electrical-thermal co-simulation of 3D integrated systems with micro-fluidic cooling and Joule heating effects

J Xie, M Swaminathan - IEEE Transactions on Components …, 2011 - ieeexplore.ieee.org
In this paper, the electrical-thermal co-simulation of 3D systems with Joule heating, fluidic
cooling and air convection effects is proposed. The finite-volume method formulations of …

Electrical modeling of through silicon and package vias

T Bandyopadhyay, R Chatterjee… - … Conference on 3D …, 2009 - ieeexplore.ieee.org
This paper presents analytical modeling and 3D full-wave electromagnetic (EM) simulation
of the bias voltage dependent semiconductor (MOS) capacitance of a Through Silicon Via …

Interposer-on-glass package structures

CH Yu, JC Lin - US Patent 8,411,459, 2013 - Google Patents
A device includes an interposer including a substrate, and a first through-substrate via (TSV)
penetrating through the substrate. A glass substrate is bonded to the interposer through a …

Effects of Al2O3 on the coefficient of thermal expansion and dielectric properties of borosilicate glasses as an interposer for 3D packaging

Y Liu, T Liang, W Zheng, Y Liu, H Fu, Q Liu, C Wu… - Ceramics …, 2024 - Elsevier
Borosilicate glass substrates are widely used in packaging utilizing through-glass-via (TGV)
technology. In this study, we prepared glass substrate samples with different Al 2 O 3 …

Design and fabrication of bandpass filters in glass interposer with through-package-vias (TPV)

V Sridharan, S Min, V Sundaram… - 2010 Proceedings …, 2010 - ieeexplore.ieee.org
This paper presents the integration of WLAN (2.4 and 5 GHz) bandpass filters in glass
interposer using through-package vias. The filters include novel embedded passive …

Measurement and analysis of through glass via noise coupling and shielding structures in a glass interposer

G Park, Y Kim, K Cho, J Park, I Hwang… - IEEE Transactions …, 2021 - ieeexplore.ieee.org
In this article, we first measured through glass via (TGV) noise coupling and the
effectiveness of shielding structures in a glass interposer. To analyze the noise coupling …

Carbon nanotube growth for through silicon via application

R Xie, C Zhang, MH Van der Veen, K Arstila… - …, 2013 - iopscience.iop.org
Through silicon via (TSV) technology is key for next generation three-dimensional integrated
circuits, and carbon nanotubes (CNT) provide a promising alternative to metal for filling the …