A review on the mainstream through-silicon via etching methods

H Guo, S Cao, L Li, X Zhang - Materials Science in Semiconductor …, 2022 - Elsevier
Currently, 3D integration is considered to be the most promising development direction
forchip industry. It relies on the through-silicon via (TSV) structure to achieve mechanical …

Porous nitride semiconductors reviewed

PH Griffin, RA Oliver - Journal of Physics D: Applied Physics, 2020 - iopscience.iop.org
Porous nitride semiconductors are a fast-developing area of study, which open up a wide
range of new properties and applications, including strain free optical reflectors, chemical …

High-performance methanol sensor based on GaN nanostructures grown on silicon nanoporous pillar array

HF Ji, WK Liu, S Li, Y Li, ZF Shi, YT Tian… - Sensors and Actuators B …, 2017 - Elsevier
GaN/Si nanoheterostructures were prepared by depositing GaN nanograins on silicon
nanoporous pillar array (Si-NPA) with chemical vapor deposition method. Structural …

Porous GaN photoelectrode fabricated by photo-assisted electrochemical etching using ionic liquid as etchant

MR Zhang, SJ Qin, HD Peng, GB Pan - Materials Letters, 2016 - Elsevier
Here we report an environment-friendly approach to fabricate porous GaN photoelectrode
using ionic liquid as the etchant. SEM images revealed photo-assisted electrochemical …

Precise structural control of GaN porous nanostructures utilizing anisotropic electrochemical and chemical etching for the optical and photoelectrochemical …

Y Kumazaki, S Matsumoto, T Sato - Journal of the …, 2017 - iopscience.iop.org
A low-damaged wet process utilizing electrochemical (EC) etching and subsequent
chemical etching has been developed for the fabrication of GaN porous structures. Superior …

Improvement of Porous GaN-Based UV Photodetector with Graphene Cladding

FK Mohammed, KP Beh, A Ramizy, NM Ahmed… - Applied Sciences, 2021 - mdpi.com
This work presents the role of graphene in improving the performance of a porous GaN-
based UV photodetector. The porous GaN-based photodetector, with a mean pore diameter …

A State‐of‐the‐Art Review of Through‐Silicon Vias: Filling Materials, Filling Processes, Performance, and Integration

Q Xia, X Zhang, B Ma, K Tao, H Zhang… - Advanced …, 2025 - Wiley Online Library
Through‐silicon via (TSV) technology realizes high‐density interconnections within and
between different dies (chips) by vertically drilling holes in silicon and filling them with …

Correlation between structural and photoelectrochemical properties of GaN porous nanostructures formed by photo-assisted electrochemical etching

Y Kumazaki, A Watanabe, Z Yatabe… - Journal of the …, 2014 - iopscience.iop.org
We investigated the correlation between structural and photoelectrochemical properties of
GaN porous nanostructures formed by photo-assisted electrochemical etching. The porous …

Comparative studies between porous silicon and porous P-type gallium nitride prepared using alternating current photo-assisted electrochemical etching technique

SN Sohimee, Z Hassan, NM Ahmed… - Journal of Physics …, 2020 - iopscience.iop.org
Porous n-type Si and porous p-type GaN nanostructures were fabricated using alternating
current photo-assisted electrochemical (ACPEC) etching in 1: 4 volume ratio of hydrofluoric …

[PDF][PDF] Investigation of Wear Mechanism of Gallium Nitride

G Zeng - 2018 - core.ac.uk
Friction can be defined as the force resisting the relative motion between two surfaces.
These two surfaces can either be solid/liquid, solid/gas or liquid/gas. The frictional force is a …