Today, the vast majority of microelectromechanical system (MEMS) sensors are
mechanically rigid and therefore suffer from disadvantages when used in intimately …

This paper presents a miniature 50 mm 3 inertial measurement unit (IMU) implemented
using a folded microelectromechanical systems (MEMS) process. The approach is based on …

This work reports a comprehensive multiphysics modeling and optimization of a MEMS-
based piezoelectric inertial measurement unit (IMU) sensor using a single proof mass. The …

Atomic gyroscopes have a potential for good performance advantages and several attempts
are being made to miniaturize them. This thesis describes the efforts made in implementing …

This Ph. D. dissertation reports novel fabrication processes and architectures for
implementation of Rate Integrating Gyroscopes at micro-scale. Majority of the focus is …

In this paper, we report implementation of a folded MEMS concept, demonstrating a
prototype of Timing and Inertial Measurement Unit (TIMU) in<; 50 mm 3 volume. The …

TIMING CONTROL IN SELF-FOLDING ORIGAMI USING LATCH AND INERTIA Submitted in
partial fulfillment of the requirements for the degr Page 1 TIMING CONTROL IN SELF-FOLDING …

This paper presents a study on the structural rigidity of an Inertial Measurement Unit (IMU)
implemented using the Folded MEMS approach. For such folded structures, environmental …

This paper reports a miniature Inertial Measurement Unit (IMU) implemented using a folded
MEMS approach which allows for integration of high performance sensors, while providing a …