CMOS-based tactile sensors using oxide as sacrificial layer

MEMS using CMOS wafer

W Fang, SS Li, Y Chiu, MH Li - 3D and Circuit Integration of …, 2021 - Wiley Online Library
This chapter introduces several fabrication technologies, including different complementary
metal oxide semiconductor (CMOS) and post‐CMOS processes, to implement CMOS micro …
被引用次数：3 相关文章 所有 4 个版本
[PDF] nii.ac.jp

[PDF][PDF] Development of Robot Hand with RCM Mechanism for Covering Joints with Thick Skin

許晉誠 - 2020 - waseda.repo.nii.ac.jp
Roboticautomationgrippersandhandsareus… shapeofobjects. Thebenefitofthe multi-
linkroboticfingeristhatitvery well wrappedbyovertheobjects, whichcreatesthecontactsurface …
相关文章 所有 2 个版本