Metallic neodymium (Nd) films were sputtered on silicon substrates. The films then underwent thermal oxidation andthermal oxynitridation at various durations of 5 min, 10 min …
Metallic neodymium (Nd) films were sputtered on silicon substrates. The films then underwent thermal oxidation andthermal oxynitridation at various durations of 5 min, 10 min …