Transistors based on two-dimensional materials for future integrated circuits

S Das, A Sebastian, E Pop, CJ McClellan… - Nature …, 2021 - nature.com
Field-effect transistors based on two-dimensional (2D) materials have the potential to be
used in very large-scale integration (VLSI) technology, but whether they can be used at the …

Materials for interconnects

D Gall, JJ Cha, Z Chen, HJ Han, C Hinkle, JA Robinson… - MRS Bulletin, 2021 - Springer
The electrical resistance of interconnect wires increases with decreasing size, causing
signal delay and energy consumption that limits further downscaling of integrated circuits …

[HTML][HTML] The search for the most conductive metal for narrow interconnect lines

D Gall - Journal of Applied Physics, 2020 - pubs.aip.org
A major challenge for the continued downscaling of integrated circuits is the resistivity
increase of Cu interconnect lines with decreasing dimensions. Alternative metals have the …

[HTML][HTML] Opportunities and challenges of 2D materials in back-end-of-line interconnect scaling

CL Lo, BA Helfrecht, Y He, DM Guzman… - Journal of Applied …, 2020 - pubs.aip.org
As the challenges in continued scaling of the integrated circuit technology escalate every
generation, there is an urgent need to find viable solutions for both the front-end-of-line …

Effect of electrical current density, apparent contact pressure, and sliding velocity on the electrical sliding wear behavior of Cu–Ti3AlC2 composites

H Zhao, Y Feng, Z Zhou, G Qian, J Zhang, X Huang… - Wear, 2020 - Elsevier
The purpose of this research was to investigate the potential use of Cu–Ti 3 AlC 2
composites sliding against a Cu–5% Ag alloy as a viable electrical contact couple. Sliding …

Materials quest for advanced interconnect metallization in integrated circuits

JH Moon, E Jeong, S Kim, T Kim, E Oh, K Lee… - Advanced …, 2023 - Wiley Online Library
Integrated circuits (ICs) are challenged to deliver historically anticipated performance
improvements while increasing the cost and complexity of the technology with each …

MoS2 as an Effective Cu Diffusion Barrier with a Back-End Compatible Process

CY Kuo, YT Chang, YT Huang, IC Ni… - … Applied Materials & …, 2023 - ACS Publications
This study demonstrates molybdenum disulfide (MoS2) as a superior candidate as a
diffusion barrier and liner. This research explores a newly developed process to show how …

Electrochemical aptasensor for sensitive detection of Cardiac troponin I based on CuNWs/MoS2/rGO nanocomposite

Y Han, X Su, L Fan, Z Liu, Y Guo - Microchemical Journal, 2021 - Elsevier
Cardiac troponin I (cTnI) is a “gold standard biomarker” for clinical diagnose of acute
myocardial infarction (AMI). Rapid, accurate, and sensitive detection methods for cTnI are …

Unleashing the Power of 2D MoS2: In Situ TEM Study of Its Potential as Diffusion Barriers in Ru Interconnects

PH Feng, KY Hsiao, DJ Jhan, YL Chen… - … Applied Materials & …, 2023 - ACS Publications
This study presents the utilization of MoS2 as a diffusion barrier for metal interconnects, in
situ transmission electron microscopy (TEM) observations are employed for comprehensive …

Large‐Area Uniform 1‐nm‐Level Amorphous Carbon Layers from 3D Conformal Polymer Brushes. A “Next‐Generation” Cu Diffusion Barrier?

YH Kang, S Lee, Y Choi, WK Seong, KH Han… - Advanced …, 2022 - Wiley Online Library
A reliable method for preparing a conformal amorphous carbon (a‐C) layer with a thickness
of 1‐nm‐level, is tested as a possible Cu diffusion barrier layer for next‐generation ultrahigh …