[HTML][HTML] Investigation of HfO2 Thin Films on Si by X-ray Photoelectron Spectroscopy, Rutherford Backscattering, Grazing Incidence X-ray Diffraction and Variable …

X Luo, Y Li, H Yang, Y Liang, K He, W Sun, HH Lin… - Crystals, 2018 - mdpi.com
Hafnium oxide (HfO2) thin films have been made by atomic vapor deposition (AVD) onto Si
substrates under different growth temperature and oxygen flow. The effect of different growth …

[HTML][HTML] Spatially resolved thermometry of resistive memory devices

E Yalon, S Deshmukh, M Muñoz Rojo, F Lian… - Scientific reports, 2017 - nature.com
The operation of resistive and phase-change memory (RRAM and PCM) is controlled by
highly localized self-heating effects, yet detailed studies of their temperature are rare due to …

[HTML][HTML] Thermodynamic Modeling of the Hf-Ta-O System for the Design of Oxidation Resistant HfC-TaC Ceramics

R Zaman, EJ Opila, BC Zhou - Open Ceramics, 2024 - Elsevier
An improved understanding of the oxidation resistance of HfC-TaC ultra-high temperature
ceramics (UHTCs) is developed through modeling of the phase equilibria in the Hf-Ta-O …

Influence of Hf precursor concentration on various properties of sol-gel based spin coated HfO2 thin films

A Kompa, D Kekuda, MS Murari, KM Rao - Optical Materials, 2023 - Elsevier
Rigorous studies on hafnium oxide (HfO 2) thin films are crucial as it is regarded as the ideal
insulating material, for the replacement of silicon dioxide (SiO 2) dielectric material, widely …

Modulation of ferroelectricity in atomic layer deposited HfO2/ZrO2 multilayer films

H Chen, L Tang, H Luo, X Yuan, D Zhang - Materials Letters, 2022 - Elsevier
HfO 2/ZrO 2 multilayer films were deposited by atomic layer deposition (ALD) method. The
remnant polarization and the dielectric constant are remarkably improved to 10.2 µC/cm 2 …

Point defects in stoichiometric and nonstoichiometric metal oxides for modern microelectronics

V Kolkovsky, R Stübner - Metal Oxide Defects, 2023 - Elsevier
Defects in metal oxides play a crucial role in the performance of semiconductor devices in
modern microelectronics. Due to different growth techniques and growth parameters, the …

[HTML][HTML] Micro-Raman spectroscopy for monitoring of deposition quality of high-k stack protective layer onto nanowire FET chips for highly sensitive miRNA detection

KA Malsagova, TO Pleshakova, AF Kozlov, ID Shumov… - Biosensors, 2018 - mdpi.com
Application of micro-Raman spectroscopy for the monitoring of quality of high-k (hk)
dielectric protective layer deposition onto the surface of a nanowire (NW) chip has been …

Effect of number of sol-layer on structural, optical, morphological, and compositional properties of HfO2 films

D Kekuda, MS Murari - Physica B: Condensed Matter, 2024 - Elsevier
Using sol-gel based spin coating HfO 2 thin films were prepared on quartz substrates. The
effect of sol-layer thickness on structural, optical, morphological and compositional …

Synthesis, structural, Raman scattering and magnetic properties of Fe-doped HfO2 nanoparticles

R Singhal, MK Singh, A Kumar… - Materials Research …, 2019 - iopscience.iop.org
Hf 1− x Fe x O 2 (x= 0.0, 0.03, and 0.05) materials were synthesized using co-precipitation
method. The phase purity and crystal structure of various Fe doped Hf 1− x Fe x O 2 …

[PDF][PDF] Demonstration of ferroelectricity in PLD grown HfO2-ZrO2 nanolaminates

SS Das - 2021 - digital.library.txstate.edu
Ferroelectricity was demonstrated for Pulsed Laser Deposition (PLD) of HfO 2-ZrO 2 bilayer
thin films grown on TiN bottom electrodes on SiO 2/Si as a function of deposition conditions …