We present a review on stencil lithography and focus on the particular interest and
challenges when applying it to the scalable fabrication of nm-size devices. We first describe …

Microengineering technologies give us some opportunities in developing high-tech sensing
systems that operate with low volumes of samples, integrates one or more laboratory …

This review summarizes the reported MEMS resonators integrated monolithically in CMOS
technology and their main applications as oscillator circuits in timing applications and in …

This paper reports on the study and characterization of the non-linear regime of two CMOS-
NEMS flexural resonators electrically transduced for mechanical memory applications. A …

Measurements of the gauge factor of suspended, top-down silicon nanowires are presented.
The nanowires are fabricated with a CMOS compatible process and with doping …

A quantitative analysis of blurring and its dependence on the stencil–substrate gap and the
deposition parameters in stencil lithography, a high resolution shadow mask technique, is …

Hydrogen sensing is essential to ensure safety in near-future zero-emission fuel cell
powered vehicles. Here, we present a novel hydrogen sensor based on the resonant …

Highly sensitive conversion of motion into readable electrical signals is a crucial and
challenging issue for nanomechanical resonators. Efficient transduction is particularly …

The detection back-action phenomenon has received little attention in physical, chemical,
and biological sensors based on nanomechanical systems. We show that this effect is very …

Microelectromechanical sensors have extreme mass sensitivities, making them promising
for mass sensing, gas sensing, and biosensing applications. Despite the numerous …