Modification of the Terman method for determination of interface states in metal–insulator–semiconductor structures

N Novkovski - Journal of Physics Communications, 2017 - iopscience.iop.org
In this work a modification of Terman method for determination of interfacial energy states
located in the forbidden energy gap of the semiconductor (interface states) convenient for …

Frequency Dependence of CV Characteristics of MOS Capacitors Containing Nanosized High‐κ Ta2O5 Dielectrics

N Novkovski, E Atanassova - Advances in Materials Science …, 2017 - Wiley Online Library
Capacitance of metal–insulator–Si structures containing high permittivity dielectric exhibits
complicated behaviour when voltage and frequency dependencies are studied. From our …

Investigation and Modeling of Multifrequency CV characteristics for 10-nm Bulk FinFETs at Cryogenic Temperatures

S Gupta, A Amin, RA Vega, A Dixit - Solid-State Electronics, 2024 - Elsevier
In this work, multifrequency capacitance–voltage characteristics have been investigated
from 300K to 10K for high-k HfO 2-based 10-nm bulk n-channel FinFETs. The dispersion …

Determination of interface states in metal (Ag, TiN, W)− Hf: ta2O5/SiOxNy− Si structures by different compact methods

N Novkovski - Materials Science in Semiconductor Processing, 2015 - Elsevier
In this work a compact set of analytical methods for determination of the interface state
densities of metal-insulator-silicon structures containing ultrathin dielectrics is constructed …

Accumulation gate capacitance of MOS devices with ultrathin high-/spl kappa/gate dielectrics: modeling and characterization

AE Islam, A Haque - IEEE transactions on electron devices, 2006 - ieeexplore.ieee.org
A quantum-mechanical (QM) model is presented for accumulation gate capacitance of MOS
structures with high-/spl kappa/gate dielectrics. The model incorporates effects due to …

Study of silicon–organic interfaces by admittance spectroscopy

S Kar - Applied surface science, 2006 - Elsevier
An admittance spectroscopy technique has been developed for the interfaces between
organic monolayers and silicon. The present work involves the development of an effective …

Frequency dependence of the effective series capacitance of metal–Ta2O5/SiO2–Si structures

N Novkovski, E Atanassova - Semiconductor science and …, 2007 - iopscience.iop.org
The frequency dependence of the capacitance in accumulation of the metal–Ta 2 O 5/SiO 2–
Si structures was studied in the frequency range from 20 Hz to 1 MHz. The capacitances at …

Electrical behaviour of Ti-doped Ta2O5 on N2O-and NH3-nitrided Si

D Spassov, E Atanassova, A Paskaleva… - Semiconductor …, 2009 - iopscience.iop.org
The influence of process parameters: doping approach, Si surface nitridation ambient (NH 3
and N 2 O), type of the gate (Al and W) and its technology of deposition on the electrical …

Stress-induced leakage currents of the RF sputtered Ta2O5 on N-implanted silicon

N Novkovski, E Atanassova, A Paskaleva - Applied surface science, 2007 - Elsevier
The electrical (C–V and I–V) and reliability (constant current stress technique) properties of
RF sputtered 30nm thick Ta2O5 on N-implanted Si have been investigated. The …

Charge trapping during constant current stress in Hf-doped Ta2O5 films sputtered on nitrided Si

N Novkovski, E Atanassova - Thin Solid Films, 2011 - Elsevier
Metal–insulator–silicon structures containing Hf-doped Ta2O5 dielectric films sputtered on
rapid thermally nitrided Si are shown to have very good reliability properties. Stress-induced …