Position sensors with nanometer resolution are a key component of many precision imaging
and fabrication machines. Since the sensor characteristics can define the linearity …

Recent interest in high-speed scanning probe microscopy for high-throughput applications
including video-rate atomic force microscopy and probe-based nanofabrication has sparked …

This paper focuses on the design and analysis of a novel flexure-based mechanism which is
capable of performing planar motion with three degrees of freedom (3-DOF). This …

In this study, the actuator load force of a nanopositioning stage is utilized as a feedback
variable to achieve both tracking and damping. The transfer function from the applied …

This paper demonstrates a simple second-order controller that eliminates scan-induced
oscillation and provides integral tracking action. The controller can be retrofitted to any …

An XYZ nanopositioner is designed for fast the atomic force microscopy. The first resonant
modes of the device are measured at 8.8, 8.9, and 48.4 kHz along the X-, Y-, and Z-axes …

Ionic polymer–metal composites (IPMC) are smart material transducers that bend in
response to low-voltage stimuli and generate voltage in response to bending. IPMCs are …

Nanotechnology is the branch of science which deals with the manipulation of matters at an
extremely high resolution down to the atomic level. In recent years, atomic force microscopy …

This paper presents a novel piezoelectric strain sensor for damping and accurate tracking
control of a high-speed nanopositioning stage. Piezoelectric sensors have the benefit of …

Improved systems, methods, and devices relating to optical fiber scanners are provided. In
one aspect, a scanning apparatus includes an optical fiber and a piezoelectric actuator …