A review of recent studies on piezoelectric pumps and their applications

H Li, J Liu, K Li, Y Liu - Mechanical Systems and Signal Processing, 2021 - Elsevier
Piezoelectric pumps have obtained considerable significance and have become the focus
area of research for biomedicine, fuel supply, liquid cooling, chemistry and precision driving …

Microfluidic device fabrication mediated by surface chemical bonding

R Sivakumar, NY Lee - Analyst, 2020 - pubs.rsc.org
This review discusses various bonding strategies for fabricating microfluidic devices, with a
special emphasis on the modification of the surface assisted by the use of chemicals to …

[HTML][HTML] Pumps operated by solid-state electromechanical smart material actuators-A review

EA Sideris, HC De Lange - Sensors and Actuators A: Physical, 2020 - Elsevier
There has been a substantial amount of research on liquid pumps operated by solid-state
electroactive smart material actuators since the first such pump was developed in 1975 …

An integrated multilayer ceramic piezoelectric micropump for microfluidic systems

W Zhang, RE Eitel - Journal of intelligent material systems …, 2013 - journals.sagepub.com
A package-level peristaltic piezoelectric micropump has been designed and fabricated in
utilizing multilayer ceramic fabrication methods. The device was fabricated using …

Flexible pump for small-scale soft robotics: actuation, design and prospects

H Sun, J Zhao, Y Zhang, M Xu - Measurement, 2024 - Elsevier
For soft robots, fluid power is an essential propulsion technique. The pump, which is the
“heart” of these systems, has significant issues with size, weight, and noise. It also needs to …

PDMS–PMMA bonding improvement using SiO2 intermediate layer and its application in fabricating gas micro valves

AR Norouzi, A Nikfarjam, H Hajghassem - Microsystem Technologies, 2018 - Springer
In this study a modified technique is presented for bonding PDMS membrane to PMMA
substrate using thin SiO 2 intermediate layer to enhance PMMA surface's hydrophilicity, and …

Design of efficient MEMS based actuator for drug delivery applications

V Khare, A Singh - International Conference for Convergence …, 2014 - ieeexplore.ieee.org
The advancements in drug delivery system are of great value when the betterment of human
life comes into one's mind. Although so many improvisations have already been done over …

Understanding frequency response of thermal micropumps using electrical network analogy

HK Bardaweel - Canadian Journal of Physics, 2014 - cdnsciencepub.com
In this article the frequency response of a thermal micropump is investigated using electrical
network analogy modeling technique. This technique is based on dividing the micropump …

[图书][B] High performance piezoelectric materials and devices for multilayer low temperature co-fired ceramic based microfluidic systems

W Zhang - 2011 - search.proquest.com
The incorporation of active piezoelectric elements and fluidic components into micro-
electromechanical systems (MEMS) is of great interest for the development of sensors …

Design, modeling, fabrication, and testing of a multistage micro gas compressor with piezoelectric unimorph diaphragm and passive microvalves for microcooling …

S Thanhson - 2017 - search.proquest.com
This dissertation investigates the development of a multistage micro gas compressor
utilizing multiple pump stages cascaded in series to increase the pressure rise with passive …