Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …

Ultrasound detection is one of the major components of photoacoustic imaging systems.
Advancement in ultrasound transducer technology has a significant impact on the translation …

Today, the vast majority of microelectromechanical system (MEMS) sensors are
mechanically rigid and therefore suffer from disadvantages when used in intimately …

In this study, we fabricated a row-column addressed 2-dimensional piezoelectric
micromachined ultrasonic transducer (pMUT) array based on the monocrystalline Pb (Zr, Ti) …

With the development of technology, systems gravitate towards increasing in their
complexity, miniaturization, and level of automation. Amongst these systems, ultrasonic …

This article presents a fully integrated ultrasound system based on a single piezoelectric
micromachined ultrasonic transducer (PMUT) monolithically fabricated with a 0.13 μm …

Piezoelectric Micromachined Ultrasonic Transducers (PMUT) and Capacitive
Micromachined Ultrasonic Transducers (CMUT) have seen great developments in recent …

As medical ultrasound imaging moves from conventional cart-based scanners to new form
factors such as imaging catheters, hand-held point-of-care scanners and ultrasound …

Implantable medical devices are increasingly being used to perform electrophysiological
stimulation, thus calling for wireless implantable neural stimulators for which wireless power …

In this work we present an array of piezoelectric micromachined ultrasound transducer
(PMUT's) based on AlScN piezoelectric layer, monolithically integrated on top of a 130 nm …