In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …

This review describes the application of non-thermal plasma (NTP) technology for high
barrier layer fabrication in packaging area. NTP technology is considered to be the most …

Low pressure capacitive radio frequency (RF) plasmas are often described by equivalent
circuit models based on fluid approaches that predict the self-excitation of resonances, eg …

In simulation as well as analytical modeling studies of low-pressure capacitively coupled
radio frequency (CCRF) discharges, the assumption of both a driving voltage source or a …

The electrical asymmetry effect (EAE) enables separate control of the ion flux and the mean
ion energy in capacitively coupled plasmas (CCP). While a variety of plasma processing …

It is well-known that standing waves having radially center-high rf voltage profiles exist in
high frequency capacitive discharges. It is also known that in radially uniform discharges, the …

It is well-known that the nonlinear series resonance in a high frequency capacitive discharge
enhances the electron power deposition and also creates standing waves which produce …

Plasma series resonance (PSR) effect is well known in geometrically asymmetric
capacitively couple radio frequency plasma. However, plasma series resonance effect in …

The self-excitation of plasma series resonance (PSR) oscillations plays an important role in
the electron heating dynamics in capacitively coupled radio-frequency (CCRF) plasmas. In a …

It is well-known that standing waves having radially center-high voltage profiles exist in high
frequency driven capacitive discharges. Capacitive sheaths can also nonlinearly excite …