This work reports investigation on the deposition and evaluation of an aluminum-doped zinc oxide (AZO) thin film and its novel applications to micro-and nano-devices. The AZO thin film …
This paper presents processes for glass micromachining, including sandblast, wet etching, reactive ion etching (RIE), and glass reflow techniques. The advantages as well as …
Porous silicon (Si) is a low thermal conductivity material, which has high potential for thermoelectric devices. However, low output performance of porous Si hinders the …
T Ono, T Ezura, N Inomata - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
A vibration readout of a resonant structure based on inverse magnetostriction with an integrated Hall sensor is proposed. A bi-material FeGa/Si cantilever is fabricated using …
N Van Toan, T Kubota, H Sekhar… - Journal of …, 2014 - iopscience.iop.org
The fabrication and evaluation of silicon micromechanical resonators using neutral beam etching (NBE) technology is presented. An etching technique based on a low energy neutral …
In this paper, the metal‐assisted chemical etching (MACE) method is presented along with the advantages of using this method. Large areas and a combination of large and narrow …
This work presents a comprehensive investigation of micro-supercapacitors (MSCs) based on graphene nanowalls (GNWs), covering core material synthesis, device fabrication …
This paper presents a metal-assisted chemical etching (MACE) method for high aspect silicon structures. Ultrahigh aspect trenches and pillars of 400 and 80, respectively, have …
Z Qing, B Li, H Li, Y Li, S Zhang - Journal of Materials Science: Materials in …, 2014 - Springer
Abstract Li 2 O–Al 2 O 3–SiO 2 (LAS) glass–ceramics for low temperature co-fired ceramics (LTCC) application were prepared by melting method, and the effects of MgO on the …