Chemical etching of glasses in hydrofluoric Acid: A brief review
The removal of material, selectively or non-selectively, from the surface of glasses by using
acidic, caustic, or abrasive chemicals is referred to as glass etching. Wet and dry etchings …
acidic, caustic, or abrasive chemicals is referred to as glass etching. Wet and dry etchings …
Aluminum doped zinc oxide deposited by atomic layer deposition and its applications to micro/nano devices
This work reports investigation on the deposition and evaluation of an aluminum-doped zinc
oxide (AZO) thin film and its novel applications to micro-and nano-devices. The AZO thin film …
oxide (AZO) thin film and its novel applications to micro-and nano-devices. The AZO thin film …
An investigation of processes for glass micromachining
This paper presents processes for glass micromachining, including sandblast, wet etching,
reactive ion etching (RIE), and glass reflow techniques. The advantages as well as …
reactive ion etching (RIE), and glass reflow techniques. The advantages as well as …
Formation and evaluation of silicon substrate with highly-doped porous Si layers formed by metal-assisted chemical etching
Porous silicon (Si) is a low thermal conductivity material, which has high potential for
thermoelectric devices. However, low output performance of porous Si hinders the …
thermoelectric devices. However, low output performance of porous Si hinders the …
Vibration readout of microstructure based on inverse-magnetostriction with an integrated Hall sensor
T Ono, T Ezura, N Inomata - IEEE Sensors Journal, 2024 - ieeexplore.ieee.org
A vibration readout of a resonant structure based on inverse magnetostriction with an
integrated Hall sensor is proposed. A bi-material FeGa/Si cantilever is fabricated using …
integrated Hall sensor is proposed. A bi-material FeGa/Si cantilever is fabricated using …
Mechanical quality factor enhancement in a silicon micromechanical resonator by low-damage process using neutral beam etching technology
N Van Toan, T Kubota, H Sekhar… - Journal of …, 2014 - iopscience.iop.org
The fabrication and evaluation of silicon micromechanical resonators using neutral beam
etching (NBE) technology is presented. An etching technique based on a low energy neutral …
etching (NBE) technology is presented. An etching technique based on a low energy neutral …
Low cost and high‐aspect ratio micro/nano device fabrication by using innovative metal‐assisted chemical etching method
N Van Toan, X Wang, N Inomata… - Advanced …, 2019 - Wiley Online Library
In this paper, the metal‐assisted chemical etching (MACE) method is presented along with
the advantages of using this method. Large areas and a combination of large and narrow …
the advantages of using this method. Large areas and a combination of large and narrow …
Nanoengineered micro-supercapacitors based on graphene nanowalls for self-powered wireless sensing system
This work presents a comprehensive investigation of micro-supercapacitors (MSCs) based
on graphene nanowalls (GNWs), covering core material synthesis, device fabrication …
on graphene nanowalls (GNWs), covering core material synthesis, device fabrication …
High aspect ratio silicon structures produced via metal-assisted chemical etching and assembly technology for cantilever fabrication
This paper presents a metal-assisted chemical etching (MACE) method for high aspect
silicon structures. Ultrahigh aspect trenches and pillars of 400 and 80, respectively, have …
silicon structures. Ultrahigh aspect trenches and pillars of 400 and 80, respectively, have …
Effects of MgO on properties of Li2O–Al2O3–SiO2 glass–ceramics for LTCC applications
Abstract Li 2 O–Al 2 O 3–SiO 2 (LAS) glass–ceramics for low temperature co-fired ceramics
(LTCC) application were prepared by melting method, and the effects of MgO on the …
(LTCC) application were prepared by melting method, and the effects of MgO on the …