Technology and reliability of normally-off GaN HEMTs with p-type gate

M Meneghini, O Hilt, J Wuerfl, G Meneghesso - Energies, 2017 - mdpi.com
GaN-based transistors with p-GaN gate are commonly accepted as promising devices for
application in power converters, thanks to the positive and stable threshold voltage, the low …

Atomic layer deposition of silicon nitride thin films: a review of recent progress, challenges, and outlooks

X Meng, YC Byun, HS Kim, JS Lee, AT Lucero… - Materials, 2016 - mdpi.com
With the continued miniaturization of devices in the semiconductor industry, atomic layer
deposition (ALD) of silicon nitride thin films (SiNx) has attracted great interest due to the …

Forward bias gate breakdown mechanism in enhancement-mode p-GaN gate AlGaN/GaN high-electron mobility transistors

TL Wu, D Marcon, S You, N Posthuma… - IEEE Electron device …, 2015 - ieeexplore.ieee.org
In this letter, we studied the forward bias gate breakdown mechanism on enhancement-
mode p-GaN gate AlGaN/GaN high-electron mobility transistors. To the best of our …

Reliability and failure analysis in power GaN-HEMTs: An overview

M Meneghini, I Rossetto, C De Santi… - 2017 IEEE …, 2017 - ieeexplore.ieee.org
Power GaN transistors have recently demonstrated to be excellent devices for application in
power electronics. The high breakdown field and the superior mobility of the 2-dimensional …

Negative bias-induced threshold voltage instability in GaN-on-Si power HEMTs

M Meneghini, I Rossetto, D Bisi… - IEEE Electron …, 2016 - ieeexplore.ieee.org
This letter reports an in-depth study of the negative threshold voltage instability in GaN-on-Si
metal-insulator–semiconductor high electron mobility transistors with partially recessed …

Normally-Off LPCVD-SiNx/GaN MIS-FET With Crystalline Oxidation Interlayer

M Hua, J Wei, G Tang, Z Zhang, Q Qian… - IEEE Electron …, 2017 - ieeexplore.ieee.org
Developing effective technique to protect the etched-GaN surface from the degradation in a
high-temperature (ie, at~ 780° C) process, such as low-pressure chemical vapor deposition …

Machine learning-based statistical approach to analyze process dependencies on threshold voltage in recessed gate AlGaN/GaN MIS-HEMTs

TL Wu, SB Kutub - IEEE Transactions on Electron Devices, 2020 - ieeexplore.ieee.org
In this work, we demonstrate the use of a machine learning (ML)-based statistical approach
to model and analyze the impact of the fabrication processes on the threshold voltage in …

Toward understanding positive bias temperature instability in fully recessed-gate GaN MISFETs

TL Wu, J Franco, D Marcon, B De Jaeger… - … on Electron Devices, 2016 - ieeexplore.ieee.org
In this paper, fully recessed-gate GaN MISFETs with two different gate dielectrics, ie, plasma-
enhanced atomic layer deposition (PEALD) SiN and ALD Al 2 O 3 gate dielectric, are used …

Investigation of the Trap States and Instability in LPCVD Si3N4/AlGaN/GaN MIS-HEMTs with an In-Situ Si3N4 Interfacial Layer

H Sun, M Wang, R Yin, J Chen, S Xue… - … on Electron Devices, 2019 - ieeexplore.ieee.org
A novel gate and passivation dielectric stack consisting of a thin metal-organic chemical
vapor deposition (MOCVD) grown in-situ Si 3 N 4 (3 nm) and a thick lowpressure chemical …

Gate stability of GaN-based HEMTs with p-type gate

M Meneghini, I Rossetto, V Rizzato, S Stoffels… - Electronics, 2016 - mdpi.com
This paper reports on an extensive investigation of the gate stability of GaN-based High
Electron Mobility Transistors with p-type gate submitted to forward gate stress. Based on …