Review of cutting-edge sensing technologies for urban underground construction

E Ma, J Lai, L Wang, K Wang, S Xu, C Li, C Guo - Measurement, 2021 - Elsevier
An accurate understanding of infrastructure performance is beneficial for averting potentially
severe accidents during construction because the increasing development of urban …

Measurement of residual stress and Young's modulus on micromachined monocrystalline 3C-SiC layers grown on< 111> and< 100> silicon

S Sapienza, M Ferri, L Belsito, D Marini, M Zielinski… - Micromachines, 2021 - mdpi.com
3C-SiC is an emerging material for MEMS systems thanks to its outstanding mechanical
properties (high Young's modulus and low density) that allow the device to be operated for a …

Vacuum packaged low-power resonant MEMS strain sensor

CD Do, A Erbes, J Yan, K Soga… - Journal of …, 2016 - ieeexplore.ieee.org
This paper describes a technical approach toward the realization of a low-power
temperature-compensated micromachined resonant strain sensor. The sensor design is …

Fabrication of high-resolution strain sensors based on wafer-level vacuum packaged MEMS resonators

L Belsito, M Ferri, F Mancarella, L Masini, J Yan… - Sensors and Actuators A …, 2016 - Elsevier
The paper reports on the fabrication and characterization of high-resolution strain sensors
for structural materials based on Silicon On Insulator flexural resonators manufactured by …

Nanostrain resolution strain sensing by monocrystalline 3C-SiC on SOI electrostatic MEMS resonators

L Belsito, M Bosi, F Mancarella, M Ferri… - Journal of …, 2019 - ieeexplore.ieee.org
The paper reports on the fabrication and characterization of flexural resonators designed for
resonant strain sensing and manufactured using 2 μm thick monocrystalline 3C-SiC layers …

Advancements in noninvasive pressure sensing in hydraulic components

M Ruggeri, L Belsito, F Bosi… - Fluid Power …, 2023 - asmedigitalcollection.asme.org
Sensors and sensorized components are gaining for importance in hydraulics, due to
increasing need for control and diagnostics. Sensors and specifically pressure sensors are …

A hybrid vibration powered microelectromechanical strain gauge

Y Jia, CD Do, X Zou, AA Seshia - IEEE Sensors Journal, 2015 - ieeexplore.ieee.org
This paper reports the demonstration of an ultra-low-power micro-electromechanical system
(MEMS)-CMOS oscillator for strain sensing, powered by a miniature piezoelectric vibration …

Precision resonant beam strain sensor employing gap-dependent frequency shift

A Ozgurluk, CTC Nguyen - 2020 Joint Conference of the IEEE …, 2020 - ieeexplore.ieee.org
A micromechanical structure for on-chip strain sensing maps strain-induced gap changes to
resonance frequency shifts while employing differential strategies to null out bias …

Innovation in instrumentation, monitoring, and condition assessment of infrastructure

K Soga - Multi-hazard Approaches to Civil Infrastructure …, 2016 - Springer
Future-proofing our existing and new infrastructure has become a constant theme in
government and industry discussions. To achieve this, we need to understand the …

Whole life sensing of infrastructure

K Soga - Developments in Earthquake Geotechnics, 2018 - Springer
One of the greatest challenges facing civil engineers is the stewardship of ageing
infrastructure. At present, it is difficult to inspect the condition of infrastructure while it is being …