Mechanistic understanding of the reactions of small molecules containing C, N and O with Si
surfaces is not only fundamentally interesting but also practically important to the …

The bonding of the trimethylamine (TMA) and dimethylamine (DMA) with crystalline silicon
surfaces has been investigated using X-ray photoelectron spectroscopy (XPS), Fourier …

Methods that can be used to tailor the surface properties of semiconductors will become
increasingly important as new applications for semiconductor-based materials continue to …

(54) METHODS FOR CONTROLLING DOPANT 4,243,865 A 1/1981 Saxena
CONCENTRATION AND ACTIVATION IN 5,429,708 A* 7/1995 Linford et al................. 216.66 …

ZnO is a wide bandgap semiconductor possessing unique electrical, mechanical, and
optical properties. Piezoelectric ZnO film has a high electro-mechanical coupling coefficient …

The dissociative adsorption of NH3 on Si (100)-(2× 1) has been studied using accurate
surface coverage measurements, temperature programmed desorption. Auger spectroscopy …

The experimental ability to reach rapidly, under UHV and on the same substrate holder, the
high temperatures (1100 K) required for silicon surface reconstructions and the low …

We present results of detailed x-ray photoemission and ultraviolet photoemission
spectroscopic studies of the reactions of silicon with ammonia and atomic nitrogen. We show …

Ammonia is a good model system for the study of co-adsorption interactions, including
indirect effects such as charge and strain-induced local effects on adsorption sites, and …

The role of surface structure in controlling NH3 surface chemistry has been investigated by
N 1s and Si 2p core level photoemission on Si (001)-2× 1 and Si (111)-7× 7, taking …