Review of polymer MEMS micromachining
The development of polymer micromachining technologies that complement traditional
silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) …
silicon approaches has enabled the broadening of microelectromechanical systems (MEMS) …
FEM simulation and material selection for enhancing the performance of a RF-MEMS capacitive switch
The performance of radio-frequency microelectromechanical systems (RF-MEMS) is based
on the material and geometry of the switching device. The first step of any design process is …
on the material and geometry of the switching device. The first step of any design process is …
Design analysis and simulation of a digital RF MEMS varactor with high capacitive ratio
This work presents a variable RF MEMS capacitor based on five cantilever shunt switches
for the first time. Conceptually, the proposed varactor design comprises five identical …
for the first time. Conceptually, the proposed varactor design comprises five identical …
High Performance Capacitive RF-MEMS Switch Based on HfO2 Dielectric
M Angira - Transactions on Electrical and Electronic Materials, 2019 - Springer
This paper presents a new type of capacitive shunt RF-MEMS switch. In the proposed
design, HfO 2 a high-k dielectric material has been used in place of SiO 2. The switch based …
design, HfO 2 a high-k dielectric material has been used in place of SiO 2. The switch based …
Compact low-loss high-performance single-pole six-throw RF MEMS switch design and modeling for DC to 6 GHz
Low-loss high-performance systems with smaller footprints are highly regarded in the area
of radio-frequency (RF) applications. In this paper, a multi-port single-pole six-throw (SP6T) …
of radio-frequency (RF) applications. In this paper, a multi-port single-pole six-throw (SP6T) …
Analysis of dielectric constant behavior of thermally treated SU-8 polymer up to 18 GHz
Su-8 polymer has excellent potential for application in process manufacturing. This paper
presents the effects of thermal stress on the electromagnetic properties of SU-8 polymer …
presents the effects of thermal stress on the electromagnetic properties of SU-8 polymer …
Design, simulation and analysis of a digital RF MEMS varactor using thick SU-8 polymer
This paper presents the design, simulation and analysis of a 5-bit RF MEMS digital variable
capacitor using thick SU-8 polymer to achieve both high capacitance ratio (C _ r C r) and Q …
capacitor using thick SU-8 polymer to achieve both high capacitance ratio (C _ r C r) and Q …
Design and simulation of a high tuning range MEMS digital varactor using SU-8
This paper presents the design and simulation of a 5-bit RF MEMS digital variable capacitor
with high capacitance ratio (Cr) of 43 using SU-8 material. The proposed design implements …
with high capacitance ratio (Cr) of 43 using SU-8 material. The proposed design implements …
Investigation of MEMS-based spectrally adaptive Fabry-Pérot interferometers for long-wave infrared applications
GS Gill - 2022 - research-repository.uwa.edu.au
Achieving miniaturised tunable spectral filtering in the long-wave infrared (LWIR) region
would enhance/create opportunities across a broad range of applications. It is of particular …
would enhance/create opportunities across a broad range of applications. It is of particular …
Novel high capacitance ratio compact float metal based RF MEMS switch for multi band and variable bandwidth: design and RF performance analysis
T Singh - Microsystem Technologies, 2016 - Springer
Modern complex systems, as they are multi functional, they require many small unit cells for
multi functionality. These are certain applications, where the change in operational …
multi functionality. These are certain applications, where the change in operational …