Tailored-waveform excitation of capacitively coupled plasmas and the electrical asymmetry effect

T Lafleur - Plasma Sources Science and Technology, 2015 - iopscience.iop.org
Unequal areas of the powered and grounded electrodes in single-frequency capacitively
coupled plasmas (CCPs) are well-known to generate a DC self-bias voltage and an …

Review of the gas breakdown physics and nanomaterial-based ionization gas sensors and their applications

JY Kim, I Kaganovich, HC Lee - Plasma Sources Science and …, 2022 - iopscience.iop.org
Ionization gas sensors are ubiquitous tools that can monitor desired gases or detect
abnormalities in real time to protect the environment of living organisms or to maintain clean …

Electron dynamics in low pressure capacitively coupled radio frequency discharges

S Wilczek, J Schulze, RP Brinkmann, Z Donkó… - Journal of Applied …, 2020 - pubs.aip.org
In low temperature plasmas, the interaction of the electrons with the electric field is an
important current research topic that is relevant for many applications. Particularly, in the low …

Fluid and hybrid modeling of nanosecond surface discharges: effect of polarity and secondary electrons emission

NY Babaeva, DV Tereshonok… - Plasma Sources Science …, 2016 - iopscience.iop.org
In this paper, we report on results from a computational investigation of nanosecond pulsed
surface discharges of positive and negative polarity using a 2D fluid and fluid-Monte Carlo …

eduPIC: an introductory particle based code for radio-frequency plasma simulation

Z Donkó, A Derzsi, M Vass, B Horváth… - Plasma Sources …, 2021 - iopscience.iop.org
Particle based simulations are indispensable tools for numerical studies of charged particle
swarms and low-temperature plasma sources. The main advantage of such approaches is …

Ion-Induced Surface Charge Dynamics in Freestanding Monolayers of Graphene and Probed by the Emission of Electrons

A Niggas, J Schwestka, K Balzer, D Weichselbaum… - Physical Review Letters, 2022 - APS
We compare the ion-induced electron emission from freestanding monolayers of graphene
and MoS 2 to find a sixfold higher number of emitted electrons for graphene even though …

Foundations of capacitive and inductive radio-frequency discharges

P Chabert, TV Tsankov… - Plasma Sources Science …, 2021 - iopscience.iop.org
This paper is the first from a set of two companion papers on radio-frequency (RF)
discharges. These two papers are in turn part of a larger series on the foundations of plasma …

The role of electron induced secondary electron emission from SiO2 surfaces in capacitively coupled radio frequency plasmas operated at low pressures

B Horváth, M Daksha, I Korolov, A Derzsi… - … Sources Science and …, 2017 - iopscience.iop.org
The effects of electron induced secondary electron (SE) emission from SiO 2 electrodes in
single-frequency capacitively coupled plasmas (CCPs) are studied by particle-in-cell/Monte …

[HTML][HTML] Discharge physics and atomic layer etching in Ar/C4F6 inductively coupled plasmas with a radio frequency bias

MY Yoon, HJ Yeom, JH Kim, W Chegal, YJ Cho… - Physics of …, 2021 - pubs.aip.org
Atomic layer etching (ALE), a cyclic process of surface modification and removal of the
modified layer, is an emerging damage-less etching technology for semiconductor …

On the importance of excited state species in low pressure capacitively coupled plasma argon discharges

DQ Wen, J Krek, JT Gudmundsson… - Plasma Sources …, 2023 - iopscience.iop.org
In the past three decades, first principles-based fully kinetic particle-in-cell Monte Carlo
collision (PIC/MCC) simulations have been proven to be an important tool for the …