A robust method to detect faults in reactive ion etching systems using optical emission
spectroscopy data is proposed. The approach is based on one-class support vector …

In semiconductor manufacturing, fault detection is an important method for monitoring
equipment condition and examining the potential causes of a fault. Vacuum leakage is …

The semiconductor manufacturing consists of a number of processes, and even a small fault
occurring at any point can damage the product quality. The fast and accurate detection of …

In this paper, we investigated the use of seasonal autoregressive integrated moving average
(SARIMA) time series models for fault detection in semiconductor etch equipment data. The …

OVERVIEW Semiconductor-manufacturing process control has historically relied on the dual
approach of fixed statistical process-control (SPC) limits and limited metrology sampling …

Since the first introduction of integrated circuits (ICs), there has been dramatic improvements
in semiconductor manufacturing technologies. To minimize even slightest faults in …

The current DOE targets for solar are to achieve 50 year lifetimes, and 50% cost reductions
(50/50) by 2030. These goals are challenging from both a fundamental physics mode as …

Since the invention of the integrated circuit (IC) in 1950s, semiconductor technology has
undergone dramatic development up to these days. A complete semiconductor is …

For modern semiconductor manufacturing in this era of submicron technology, device size is
continuously decreasing as component density increases. As a result of the nature of the …

Advanced Process Control (APC) and Advanced Equipment Control (AEC) which has come
to the foreground with current design nodes is expected that the 65nm node requires …