Piezoelectric MEMS based acoustic sensors: A review

WR Ali, M Prasad - Sensors and Actuators A: Physical, 2020 - Elsevier
This paper discusses piezoelectric acoustic devices based on widely used piezoelectric
materials. Commonly used piezoelectric thin film deposition techniques and the influence of …

[图书][B] Robotic tactile sensing: technologies and system

RS Dahiya, M Valle - 2013 - Springer
Future robots are expected to work closely and interact safely with real-world objects and
humans alike. Sense of touch is important in this context, as it helps estimate properties such …

Nitride-based materials for flexible MEMS tactile and flow sensors in robotics

C Abels, VM Mastronardi, F Guido, T Dattoma… - Sensors, 2017 - mdpi.com
The response to different force load ranges and actuation at low energies is of considerable
interest for applications of compliant and flexible devices undergoing large deformations …

Flexible tactile sensors using screen-printed P (VDF-TrFE) and MWCNT/PDMS composites

S Khan, S Tinku, L Lorenzelli… - IEEE sensors …, 2014 - ieeexplore.ieee.org
This paper presents and compares two different types of screen-printed flexible and
conformable pressure sensors arrays. In both variants, the flexible pressure sensors are in …

Hybrid additive manufacturing of a piezopolymer-based inertial sensor

R Bernasconi, D Hatami, HN Hosseinabadi, V Zega… - Additive …, 2022 - Elsevier
In the last few years, additive manufacturing has been investigated as a promising
production methodology in the field of electro-mechanical devices thanks to the high …

Flexible pressure sensors based on screen-printed P (VDF-TrFE) and P (VDF-TrFE)/MWCNTs

S Khan, W Dang, L Lorenzelli… - IEEE Transactions on …, 2015 - ieeexplore.ieee.org
This paper presents large-area-printed flexible pressure sensors developed with an all
screen-printing technique. The 4× 4 sensing arrays are obtained by printing polyvinylidene …

Ultraflexible tactile piezoelectric sensor based on low-temperature polycrystalline silicon thin-film transistor technology

F Maita, L Maiolo, A Minotti, A Pecora… - IEEE sensors …, 2015 - ieeexplore.ieee.org
In this paper, we present an ultraflexible tactile sensor, in a piezo-eletricoxide-
semiconductor FET configuration, composed by a poly [vinylidenefluoride-co …

Fully printed and flexible piezoelectric based touch sensitive skin

S Emamian, SGR Avuthu, BB Narakathu… - 2015 IEEE …, 2015 - ieeexplore.ieee.org
A fully printed piezoelectric based touch sensitive skin has been successfully fabricated
using screen printing technique. The device, consisting of a 4× 4 array of printed sensors …

A Review of Piezoelectric Energy Harvesting: Materials, Design, and Readout Circuits

E Brusa, A Carrera, C Delprete - Actuators, 2023 - mdpi.com
Mechanical vibrational energy, which is provided by continuous or discontinuous motion, is
an infinite source of energy that may be found anywhere. This source may be utilized to …

On-demand fabrication of piezoelectric sensors for in-space structural health monitoring

A White, I Little, A Artyuk, N McKibben… - Smart Materials and …, 2024 - iopscience.iop.org
Inflatable structures, promising for future deep space exploration missions, are vulnerable to
damage from micrometeoroid and orbital debris impacts. Polyvinylidene fluoride …