The performance of modern chips is strongly related to the multi-layer interconnect structure
that interfaces the semiconductor layer with the outside world. The resulting demand to …

Organosilicate-glass films with a varying ratio of terminal methyl and bridging ethylene
groups are synthesized using 1, 2-bis (trimethoxysilyl) ethane/methyltrimethoxysilane …

In this research, a series of green biodegradable composites were synthesized from
graphene oxide (GO) with nanolayered and poly (3-hydroxybutyrate-co-3 …

Organosilicate glass (OSG)-based porous low dielectric constant (low-k) films with different
molar ratios of 1, 3, 5-tris (triethoxysilyl) benzene to 1, 3-bis (triethoxysilyl) benzene bridging …

Self-aligned patterning schemes for microelectronics fabrication require area-selective
deposition processes. In this context, a sol–gel-based selective dielectric-on-dielectric …

We have prepared film-forming solutions for the growth of dense and porous thin
organoalkylenesiloxane (OAS) films based on copolymers of methyltrimethoxysilane and 1 …

In this work, the effects of solvent type and surfactant (porogen) on the properties of porous
methyl-modified spin-on films were investigated. A qualitative assessment of the defectivity …

Были приготовлены пленкообразующие растворы для золь-гель-формирования тонких
плотных и пористых органоалкиленсилоксановых (ОАС) пленок на основе …

The PhD research has been an integral and substantial part of my life for many years. These
were years filled with exciting experiments, thrilling ideas and hypotheses, thought …

Mesoporous inorganic thin films represent a field of research with growing importance in
applications such as sensing, optics, photovoltaic cells and protective coatings. Block …