This paper is a review of the remarkable progress that has been made during the past few
decades in design, modeling, and fabrication of micromachined resonators. Although micro …

This paper reports on the design and experimental verification of a new class of thin-film
(250 nm) superhigh-frequency laterally-vibrating piezoelectric microelectromechanical …

In order to compensate for the loss of performance when scaling resonant sensors down to
NEMS, it proves extremely useful to study the behavior of resonators up to very high …

In its most basic form an oscillator consists of a resonator driven on resonance, through
feedback, to create a periodic signal sustained by a static energy source. The generation of …

Purpose The purpose of this paper is to provide an overview of the major reliability issues of
microelectromechanical systems (MEMS) under mechanical and environmental loading …

Nonlinearities in MEMS silicon resonators are caused by different effects. Depending on the
resonator layout, different nonlinearities may be dominant in the resonator response. Based …

The interaction of waves in nonlinear media is of practical interest in the design of acoustic
devices such as waveguides and filters. This investigation of the monoatomic mass–spring …

We present a technique for estimation of the model parameters for a single-mode vibration
of symmetric micromechanical resonators, including the coefficients of conservative and …

We fabricate and characterize a microscale silicon opto-electromechanical system whose
mechanical motion is coupled capacitively to an electrical circuit and optically via radiation …

Phase noise in capacitively coupled micro-resonator-based oscillators is investigated. A
detailed analysis of noise mixing mechanisms in the resonator is presented, and the …