Strain path dependence of microstructure and annealing behavior in high purity tantalum
Unidirectional rolled (UR) and clock rolled (CR) high purity tantalum sheets were analyzed
with an emphasis on the microstructural difference in surface layers. Misorientation …
with an emphasis on the microstructural difference in surface layers. Misorientation …
The orientation dependence of stored energy and the evolution of texture of through-thickness tantalum targets during heating
L Miao, A Wang, Z Li, M Qi, P Li - Materials Characterization, 2023 - Elsevier
In semiconductor integrated circuits, the orientation dependence of the stored energy and
texture distribution uniformity of sputtering tantalum targets are critical to the properties of the …
texture distribution uniformity of sputtering tantalum targets are critical to the properties of the …
Largely alleviating the orientation dependence by sequentially changing strain paths
Grains with γ-fiber texture (< 111> direction//normal direction (ND)) and θ-fiber texture (<
100> direction//ND) show different subdivision behaviors during unidirectional rolling, which …
100> direction//ND) show different subdivision behaviors during unidirectional rolling, which …
Quantitative analysis: How annealing temperature influences recrystallization texture and grain shape in tantalum
The recrystallization behavior of tantalum was investigated under two different annealing
regimes, ie long-time annealing at low temperatures (LALT) and short-time annealing at …
regimes, ie long-time annealing at low temperatures (LALT) and short-time annealing at …
Effects of asymmetrical rolling on through-thickness microstructure and texture of body-centered cubic (BCC) tantalum
In conventional symmetric rolling (SR), the microstructure and texture inhomogeneities
along the thickness are intractable problems for body-centered-cubic (BCC) metals with high …
along the thickness are intractable problems for body-centered-cubic (BCC) metals with high …
Comparing the through-thickness gradient of the deformed and recrystallized microstructure in tantalum with unidirectional and clock rolling
J Zhu, S Liu, X Yuan, Q Liu - Materials, 2019 - mdpi.com
Controlling the microstructure homogeneity is crucial in achieving high quality tantalum (Ta)
sputtering targets used in integrated circuit fabrication. Unluckily, traditional rolling easily …
sputtering targets used in integrated circuit fabrication. Unluckily, traditional rolling easily …
Microstructure and physical-mechanical properties evolution of pure tantalum processed with hard cyclic viscoplastic deformation
L Kommel, BO Shahreza, V Mikli - … Journal of Refractory Metals and Hard …, 2019 - Elsevier
The techniques of equal channel angular pressing and hard cyclic viscoplastic deformation
were used to make changes in the microstructure and physical-mechanical properties of …
were used to make changes in the microstructure and physical-mechanical properties of …
The evolution of texture and microstructure uniformity in tantalum sheets during asymmetric cross rolling
J Zhu, S Liu, D Long, S Zhou, Y Zhu, D Orlov - Materials Characterization, 2020 - Elsevier
The evolution of texture and microstructure uniformity in tantalum (Ta) sheets for sputtering
target applications is analyzed in detail across the thickness during asymmetric cross rolling …
target applications is analyzed in detail across the thickness during asymmetric cross rolling …
Pass number dependence of through-thickness microstructure homogeneity in tantalum sheets under the change of strain path
J Zhu, S Liu, D Long, D Orlov, Q Liu - Materials Characterization, 2020 - Elsevier
Microstructure and crystallographic texture are the key factors that determine the properties
of sputtering target used in integrated circuit fabrication. Multi-pass clock-rolling has been …
of sputtering target used in integrated circuit fabrication. Multi-pass clock-rolling has been …
Effect of strain path change on the through-thickness microstructure during tantalum rolling
High purity tantalum was respectively processed by unidirectional rolling (UR) and clock
rolling (CR), and the through-thickness microstructures were investigated by multiple …
rolling (CR), and the through-thickness microstructures were investigated by multiple …