The tendency of bacterial cells to adhere and colonize a material surface leading to biofilm
formation is a fundamental challenge underlying many different applications including …

Microfabrication technologies initially developed for integrated electronics have been
successfully applied to batch-fabricate a wide variety of micromechanical structures for …

MEMS technology and applications have grown at a tremendous pace, while structural
dimensions have grown smaller and smaller, reaching down even to the molecular level …

Bulk silicon etching techniques, used to selectively remove silicon from substrates, have
been broadly applied in the fabrication of micromachined sensors, actuators, and structures …

Surface micromachining is characterized by the fabrication of micromechanical structures
from deposited thin films. Originally employed for integrated circuits, films composed of …

The conventional wisdom has been that IP is the natural protocol layer for implementing
multicast related functionality. However, ten years after its initial proposal, IP Multicast is still …

This paper describes a CMOS capacitive sensing amplifier for a monolithic MEMS
accelerometer fabricated by post-CMOS surface micromachining. This chopper stabilized …

This paper reviews CMOS (complementary metal-oxide-semiconductor) MEMS (micro-
electro-mechanical systems) fabrication technologies and enabled micro devices of various …

Over the years, the fundamentals of VLSI technology have evolved to include a wide range
of topics and a broad range of practices. To encompass such a vast amount of knowledge …

A device comprised of interlinked micromechanical resonators with capacitive mixer
transducers has been demonstrated to perform both frequency translation (ie, mixing) and …