Overview of acoustic-wave microsensors

V Ferrari, R Lucklum - Piezoelectric transducers and applications, 2008 - Springer
2 Overview of Acoustic-Wave Microsensors Page 1 2 Overview of Acoustic-Wave Microsensors
Vittorio Ferrari1 and Ralf Lucklum2 1Dipartimento di Elettronica per l’Automazione, Università di …

Non-contact liquid level measurement with electromagnetic–acoustic resonator sensors

F Lucklum, B Jakoby - Measurement Science and Technology, 2009 - iopscience.iop.org
Electromagnetic–acoustic transduction represents an alternative to piezoelectric
transduction with unique properties and advantages for resonator sensors. We have shown …

Novel magnetic–acoustic resonator sensors for remote liquid phase measurement and mass detection

F Lucklum, B Jakoby - Sensors and Actuators A: Physical, 2008 - Elsevier
Electromagnetic excitation of miniaturized acoustic resonator sensors is a novel approach
with distinct advantages over piezoelectric resonators. A much wider range of transducer …

The principle of a MEMS circular diaphragm mass sensor

AK Ismail, JS Burdess, AJ Harris… - Journal of …, 2006 - iopscience.iop.org
The paper presents the design principles of a degenerate mode resonant mass sensor in
which the unloaded sensor takes the form of a cyclically symmetric structure. The simplest …

Contactless electromagnetic excitation of resonant sensors made of conductive miniaturized structures

M Baù, V Ferrari, D Marioli, E Sardini… - Sensors and Actuators A …, 2008 - Elsevier
An electromagnetic contactless excitation principle is presented to induce mechanical
vibrations on miniaturized electrically conductive resonant structures to be used as passive …

Recent advances in lateral field excited and monolithic spiral coil acoustic transduction bulk acoustic wave sensor platforms

DF McCann, LA French, MS Wark… - Measurement Science …, 2009 - iopscience.iop.org
The quartz crystal microbalance (QCM) has been used extensively as a bulk acoustic wave
(BAW) platform for applications such as chemical and biological sensors and rate monitors …

Principle of a non-contact liquid level sensor using electromagnetic-acoustic resonators

F Lucklum, B Jakoby - e & i Elektrotechnik und Informationstechnik, 2009 - infona.pl
Liquid level measurement is a key aspect for many applications in the processing industry,
chemistry, and pharmaceutical industry to determine, eg, the exact liquid volume in a …

Contactless excitation and readout of passive sensing elements made by miniaturized mechanical resonators

M Bau, V Ferrari, D Marioli, E Sardini… - SENSORS, 2007 …, 2007 - ieeexplore.ieee.org
Mechanical resonance has been contactless excited and detected in conductive
nonmagnetic structures to be used as sensors without the need for external magnets, or …

[PDF][PDF] Contactless excitation of MEMS resonant sensors by electromagnetic driving

M Bau, V Ferrari, D Maroli - Proceedings of the COMSOL Conference, 2009 - comsol.jp
A contactless electromagnetic principle for the excitation of mechanical vibrations in
resonant structures has been investigated. The principle relies on no specific magnetic …

Experimental verification of a quasi-trapped degenerate mode magnetic acoustic resonator

BJ Gallacher, JS Burdess, ZX Hu, HT Grigg… - Sensors and Actuators A …, 2018 - Elsevier
This paper presents an elastic resonator exhibiting modal degeneracy and quasi-energy
trapping of the displacement field. Electromagnetic acoustic based coupling is employed to …