The helium ion microscope (HIM) has emerged as an instrument of choice for patterning,
imaging and, more recently, analytics at the nanoscale. Here, we review secondary electron …

Helium ion beam (HIB) technology plays an important role in the extreme fields of
nanofabrication. This paper reviews the latest developments in HIB technology as well as its …

This paper is a review on the combination between Helium Ion Microscopy (HIM) and
Secondary Ion Mass Spectrometry (SIMS), which is a recently developed technique that is of …

The helium ion microscope (HeIM) holds immense promise for nano-engineering and
imaging with scope for in-situ chemical analysis. Here we will examine the potential of …

We describe a novel method for in situ measurement of the local thickness of a freely
suspended solid-state membrane after thinning with a focused helium ion beam. The …

We investigate the ability of a focused helium ion beam to selectively modify and mill
materials. The sub nanometer probe size of the helium ion microscope used provides lateral …

Images of Ga+‐implanted amorphous silicon layers in a 110 n‐type silicon substrate have
been collected by a range of detectors in a scanning electron microscope and a helium ion …

Helium ion microscopy (HIM) is a relatively new high-resolution nanotechnology imaging
and nanofabrication tool. HIM offers a near-molecular resolution (approaching that of TEM) …

As the miniaturization of semiconductor devices continues, characterization of dopant
distribution within the structures becomes increasingly challenging. One potential solution is …

The helium ion microscope (HIM), as the name implies, is primarily an imaging tool. This
chapter serves as an introduction to imaging with the HIM and explores the various ways this …