Electrostatic micro-hydraulic systems

MM Sadeghi, HS Kim, RLB Peterson… - Journal of …, 2016 - ieeexplore.ieee.org
MEMS micro-hydraulic structures for amplification of force or deflection are introduced.
These structures are integrated with capacitances to form electrostatic micro-hydraulic …

A Flexible 3D Force Sensor with In-Situ Tunable Sensitivity

J Davies, MT Thai, TT Hoang… - … on Robotics and …, 2023 - ieeexplore.ieee.org
Following biology's lead, soft robotics has emerged as a perfect candidate for actuation
within complex environments. While soft actuation has been developed intensively over the …

High-speed electrostatic micro-hydraulics for sensing and actuation

MM Sadeghi, RL Peterson… - 2013 IEEE 26th …, 2013 - ieeexplore.ieee.org
In this paper, we report a novel architecture for significant performance enhancement of
previously introduced electrostatic micro-hydraulic structures. We develop a 2-D multi …

A differential transformer-based force sensor utilizing a magnetic fluid core

J Martin, R Rashidi - Microsystem Technologies, 2021 - Springer
A force sensor utilizing a transformer concept with a ferrofluid core was developed. A
ferrofluid reservoir was machined out of Teflon and the open top of the reservoir was sealed …

Beam steering with graded index photonic crystal lens and liquid crystal

B Bahari, J Rashed‐Mohassel - IET Optoelectronics, 2014 - Wiley Online Library
In this numerical study, a new compact and tunable beam‐steering device composed of
graded index photonic crystal lens and liquid crystal material has been presented and …

[PDF][PDF] Tactile actuator with electroactive polymer

R Zhu - 2022 - scholar.archive.org
A new actuation principle with electrodes around the deformation region for a DEAP
membrane used as a driving component of a tactile actuator is developed. Compared to …

Thick High Aspect-Ratio Biomimetic Silicon Hair Sensors as Accelerometers

Y Tang, K Najafi - Journal of Microelectromechanical Systems, 2018 - ieeexplore.ieee.org
In nature, hair typically exists in large-scale arrays, offering improved sensitivity and dynamic
range. In this paper, we present a new high aspect-ratio (HAR) hair biomimetic …

A Discrete Model for an Electrostatically Driven Micro-Hydraulic Actuator

B Shiari, MM Sadeghi… - ASME …, 2014 - asmedigitalcollection.asme.org
High-force, large-deflection actuators are critical for devices such as valves and pumps used
in micro-fluidic systems. The major technical impediment in improving the performance of …

Electrostatic Micro-Hydraulic Hair Sensors and Actuators.

MM Sadeghi - 2014 - deepblue.lib.umich.edu
A novel, optimally-designed micro-hydraulic structure is introduced to significantly improve
performance of many MEMS devices for sensing and actuation. The micro-hydraulic system …