Spatial atomic layer deposition

D Muñoz-Rojas, VH Nguyen… - … Vapor Deposition for …, 2019 - books.google.com
In conventional atomic layer deposition (ALD), precursors are exposed sequentially to a
substrate through short pulses while kept physically separated by intermediate purge steps …

Molybdenum precursor delivery approaches in atomic layer deposition of α-MoO 3

D Lorenzo, DM Tobaldi, V Tasco, M Esposito… - Dalton …, 2023 - pubs.rsc.org
In this research work, we present a study on time-sequenced plasma-enhanced atomic layer
deposition (PE-ALD) processes towards the achievement of high-quality α-MoO3 thin films …

Lossy mode resonance refractometer operating in the 1.55 µm waveband based on TiOxNy thin films deposited onto no-core multimode fiber by DC magnetron …

RI Álvarez-Tamayo, P Prieto-Cortés… - Optical Fiber …, 2022 - Elsevier
We propose and demonstrate the use of titanium oxynitrides (TiO x N y) as flexible material
for lossy-mode resonance (LMR) fiber sensing applications. The LMR characteristics of TiO …

Lossy mode resonance generation on sputtered aluminum-doped zinc oxide thin films deposited on multimode optical fiber structures for sensing applications in the …

P Prieto-Cortés, RI Álvarez-Tamayo, M García-Méndez… - Sensors, 2019 - mdpi.com
In this work, we demonstrated lossy mode resonance (LMR) generation in optical fiber
structures based on multimode fibers coated with aluminum-doped zinc oxide (AZO) films …

Role of Surface Chemistry in Pyrrole Autoxidation

NC Paranamana, MJ Young - Langmuir, 2024 - ACS Publications
Chemical compounds in liquid hydrocarbon fuels that contain five-membered pyrrole (Py)
rings readily react with oxygen from air and polymerize through a process known as …

The Optical Properties of Thin Film Alloys of ZnO, TiO2 and ZrO2 with Al2O3 Synthesised Using Atomic Layer Deposition

N Nosidlak, J Jaglarz, A Vallati, P Dulian… - Coatings, 2023 - mdpi.com
In this work, the results of ellipsometric studies of thin films of broadband oxides (ZnO, TiO2,
ZrO2) and broadband oxides doped with Al2O3 (Al2O3–ZnO, Al2O3–TiO2, Al2O3–ZrO2) are …

Spatial ALD of Al2O3 and ZnO using heavy water

S Kinnunen, T Sajavaara - Surface and Coatings Technology, 2022 - Elsevier
Al 2 O 3 and ZnO thin films were deposited from trimethylaluminium (TMA) and diethylzinc
(DEZ) in combination with water using cylindrical rotating substrate spatial atomic layer …

Magnetron sputtered Al-doped ZnO thin film as saturable absorber for passively Q-switched Er/Yb double clad fiber laser

P Prieto-Cortés, RI Álvarez-Tamayo… - Laser Physics …, 2019 - iopscience.iop.org
The passive Q-switched operation of a ring cavity Er/Yb-doped double clad fiber laser by
using an Al-doped ZnO (AZO) thin film as saturable absorber is experimentally …

Tuning the optical, electrical resistivity and structural properties of DC magnetron sputtered aluminum zinc oxide films by changing the oxygen flow rate

MS Alqahtani, NMA Hadia, SH Mohamed - Applied Physics A, 2019 - Springer
Thin films of aluminum zinc oxide (AZO) were fabricated by DC reactive magnetron
sputtering from 50 wt% Al/Zn metallic target. The structure and optical constants of AZO films …

The Optical Properties of Thin Film Alloys of ZnO, TiO [sub. 2] and ZrO [sub. 2] with Al [sub. 2] O [sub. 3] Synthesised Using Atomic Layer Deposition.

N Nosidlak, J Jaglarz, A Vallati, P Dulian… - Coatings (Basel …, 2023 - go.gale.com
In this work, the results of ellipsometric studies of thin films of broadband oxides (ZnO, TiO 2,
ZrO 2) and broadband oxides doped with Al 2 O 3 (Al 2 O 3–ZnO, Al 2 O 3–TiO 2, Al 2 O 3 …