Silicon wafers and transparent glass plates are major components in the semiconductor
industry. In semiconductor devices, the surface shape and optical thickness of the wafers …

This paper presents a non-iterative phase retrieval method from randomly phase-shifted
fringe images. By combining the hyperaccurate least squares ellipse fitting method with the …

Phase-shifting algorithms are widely used for optical metrology that extract the phase from
several fringe patterns with phase shifts. However, accurate phase shifts are always the …

This paper presents a method of significantly improving the previously proposed simple,
flexible, and accurate phase retrieval algorithm for the random phase-shifting interferometry …

In this paper, we introduce an iterative correcting algorithm for phase demodulation in
optical metrology via phase-shifting interferometry. The scheme can effectively cope with …

This paper presents a novel method to extract the phase shift and phase distribution from
two interferograms simultaneously. By employing Hilbert–Huang transform based …

We propose a non-iterative, universal phase-shifting algorithm (UPSA) for phase-
demodulation regardless if the phase steps are linear, nonuniform, or even unknown …

A novel method is presented to extract phase distribution from phase-shifted interferograms
with unknown tilt phase shifts. The proposed method can estimate the tilt phase shift …

A cascade least-squares scheme for wrapped phase extraction using two or more phase-
shifted fringe-patterns with unknown and inhomogeneous surface phase shift is proposed …

Some advances in fringe analysis technology for phase computing are presented. A full
scheme for phase evaluation, applicable to automatic applications, is proposed. The …