The emergence of two-dimensional (2D) layered materials with unique physiochemical
properties and structure versatility has significantly boosted the development of gas sensing …

The bis (tert-butylimido)-molybdenum (VI) framework has previously been used for the
successful atomic layer deposition (ALD) and chemical vapor deposition of many …

Abstract Two-dimensional (2D) MoS 2 is an emerging alternative to traditional
semiconductors, overcoming scaling limits in device fabrication. Ongoing efforts to realize …

Mo (II) and W (II) compounds, Mo (η3-allyl)(CO) 2 (Tri-MEDA) Br (1), Mo (η3-allyl)(CO) 2
(TMEDA) Br (2), W (η3-allyl)(CO) 2 (Tri-MEDA) Br (3), and W (η3-allyl)(CO) 2 (TMEDA) Br …

To implement 2D molybdenum disulfide (MoS2) in the flexible electronic industry, large,
uniform, and crystalline films on flexible substrates are needed. Thermal atomic layer …

Transition metal dichalcogenides (TMDCs) such as tungsten disulfide (WS 2) are studied for
advanced electronic and optical devices because of their unique and versatile electrical …

We demonstrate direct polycrystalline growth of molybdenum disulphide (MoS 2) via atomic
layer deposition (ALD) on 200 mm Si/SiO 2 substrates. The synthesis of MoS 2 in wafer …

2D molybdenum disulfide (MoS2) is a promising material for the application in the flexible
electronic, where large, uniform, crystalline films on flexible substrates are desired. The …

The vapor phase deposition of many molybdenum-containing films relies on the delivery of
volatile compounds with the general bis (tert-butylimido) molybdenum (VI) framework …

In this comparative study a thermal and a plasma assited atomic layer deposition (ALD)
process of aluminumoxide (Al2O3) are presented. Each process takes place in the same …