Hydrogen-doping-enabled boosting of the carrier mobility and stability in amorphous IGZTO transistors

J Lee, CH Choi, T Kim, J Hur, MJ Kim… - … Applied Materials & …, 2022 - ACS Publications
This study investigated the effect of hydrogen (H) on the performance of amorphous In–Ga–
Zn–Sn oxide (a-In0. 29Ga0. 35Zn0. 11Sn0. 25O) thin-film transistors (TFTs). Ample H in …

High mobility thin film transistors based on amorphous indium zinc tin oxide

I Noviyana, AD Lestari, M Putri, MS Won, JS Bae… - Materials, 2017 - mdpi.com
Top-contact bottom-gate thin film transistors (TFTs) with zinc-rich indium zinc tin oxide (IZTO)
active layer were prepared at room temperature by radio frequency magnetron sputtering …

Correlation between structural and optoelectronic properties of tin doped indium oxide thin films

D Ali, MZ Butt, I Muneer, F Bashir, M Saleem - Optik, 2017 - Elsevier
Spin coating method was employed to deposit the thin films using redispersed nanoparticle
suspensions of tin doped indium oxide (ITO). These films were then annealed in air at 450 …

In-Zn-Sn-O thin film based transistor with high-k HfO2 dielectric

YG Bak, JW Park, YJ Park, MZ Ansari, S NamGung… - Thin Solid Films, 2022 - Elsevier
Indium zinc tin oxide (IZTO) semiconducting thin films have been investigated as active
channel layers for thin-film transistor (TFT) applications. The IZTO layer was deposited by …

Electrical, electronic and optical properties of amorphous indium zinc tin oxide thin films

YR Denny, K Lee, S Seo, SK Oh, HJ Kang… - Applied surface …, 2014 - Elsevier
The electrical and optical properties of amorphous indium zinc tin oxide (a-IZTO) thin films
were examined as a function of chemical composition. Effects of Sn/Zn composition ratio and …

How does the multiple constituent affect the carrier generation and charge transport in multicomponent TCOs of In–Zn–Sn oxide

YB Lu, TL Yang, ZC Ling, WY Cong, P Zhang… - Journal of Materials …, 2015 - pubs.rsc.org
The main purpose of this work is to make clear that in the newly synthesized multicomponent
materials IZTO, namely, Sn/Zn cosubstituted In2O3, how can these cosubstituted dopants …

Bias–stress-induced threshold voltage shift dependence of negative charge trapping in the amorphous indium tin zinc oxide thin-film transistors

CPT Nguyen, TT Trinh, VA Dao, J Raja… - Semiconductor …, 2013 - iopscience.iop.org
Indium tin zinc oxide (ITZO)-based thin-film transistors (TFTs) were fabricated by dc
magnetron sputtering in Ar+ O 2 reactive gas, at room temperature. We present the effect of …

Transparent conducting indium zinc tin oxide thin films with low indium content deposited by radio frequency magnetron sputtering

M Putri, CY Koo, JA Lee, JJ Kim, HY Lee - Thin Solid Films, 2014 - Elsevier
Indium zinc tin oxide (IZTO) thin films were deposited on glass substrate by radio frequency
magnetron sputtering at various substrate temperatures. The indium content of the IZTO …

Effects of gas environment on electronic and optical properties of amorphous indium zinc tin oxide thin films

Y Rama Denny, S Lee, K Lee, S Seo… - Journal of Vacuum …, 2013 - pubs.aip.org
The electronic and optical properties of indium zinc tin oxide (IZTO) thin films grown under
different gas environments were investigated by means of x-ray photoelectron spectroscopy …

Characteristics of the Structure and Properties of ZnSnO3 Films by Varying the Magnetron Sputtering Parameters

FY Wu, JW Li, Y Qi, WT Ding, YY Guo… - Acta Metallurgica Sinica …, 2016 - Springer
Transparent conductive oxide ZnSnO 3 films were prepared by radio-frequency magnetron
sputtering from powder targets and were characterized by X-ray photoelectron spectroscopy …