State-of-the-art in mode-localized MEMS coupled resonant sensors: A comprehensive review

V Pachkawade - IEEE Sensors Journal, 2021 - ieeexplore.ieee.org
This article reviews the investigation of the mode-localized microelectromechanical system
(MEMS) coupled resonant sensors. This class of a sensor features a new approach in the …

Mode coupling in electromechanical systems: Recent advances and applications

ML Guo, JW Fang, JF Chen, BL Li… - Advanced Electronic …, 2023 - Wiley Online Library
Mode interactions have recently become the focus of intense research in micro/
nanoelectromechanical systems (M/NEMS) due to their ability to improve device …

Nonlinearity enhanced mode localization in two coupled MEMS resonators

Z Liu, Y Chen, X Wang, Y Xu, H Dai, Z Shi… - International Journal of …, 2024 - Elsevier
As an intriguing phenomenon in coupled dynamic systems, mode localization has garnered
considerable attention in areas such as vibration control, sensing, etc. This paper …

Mode-localized accelerometer in the nonlinear Duffing regime with 75 ng bias instability and 95 ng/√ Hz noise floor

H Zhang, M Pandit, G Sobreviela, M Parajuli… - Microsystems & …, 2022 - nature.com
Mode-localized sensors have attracted attention because of their high parametric sensitivity
and first-order common-mode rejection to temperature drift. The high-fidelity detection of …

Localized topological states beyond Fano resonances via counter-propagating wave mode conversion in piezoelectric microelectromechanical devices

JM De Ponti, X Zhao, L Iorio, T Maggioli… - Nature …, 2024 - nature.com
A variety of scientific fields like proteomics and spintronics have created a new demand for
on-chip devices capable of sensing parameters localized within a few tens of micrometers …

Nonlinear dynamics of mode-localized MEMS accelerometer with two electrostatically coupled microbeam sensing elements

NF Morozov, DA Indeitsev, VS Igumnova… - International Journal of …, 2022 - Elsevier
In the presented work, a model of a microelectromechanical accelerometer with two
microbeam sensing elements located between two fixed electrodes is proposed. The action …

Tunable seesaw-like 3D capacitive sensor for force and acceleration sensing

J Ye, F Zhang, Z Shen, S Cao, T Jin, X Guo, Z Li… - NPJ Flexible …, 2021 - nature.com
To address the resource-competing issue between high sensitivity and wide working range
for a stand-alone sensor, development of capacitive sensors with an adjustable gap …

A high-performance mode-localized accelerometer employing a quasi-rigid coupler

H Zhang, G Sobreviela, D Chen… - IEEE Electron …, 2020 - ieeexplore.ieee.org
An ultra-sensitive mode-localized accelerometer is reported in this letter. In order to lower
the coupling factor of the coupled resonators thus improving the parametric amplitude ratio …

A decouple-decomposition noise analysis model for closed-loop mode-localized tilt sensors

K Wang, XY Xiong, Z Wang, L Ma, BW Wang… - Microsystems & …, 2023 - nature.com
The development of mode-localized sensors based on amplitude output metrics has
attracted increasing attention in recent years due to the potential of such sensors for high …

Design and modeling of a MEMS accelerometer based on coupled mode-localized nonlinear resonators under electrostatic actuation

M Lyu, J Zhao, N Kacem, B Tang, P Liu, J Song… - … in Nonlinear Science …, 2021 - Elsevier
A novel dual proof mass accelerometer is proposed by introducing mode localization in two
electrostatically coupled resonators. The levering mechanism is utilized to amplify the …