Light transport in a highly multimode fiber exhibits complex behavior in space, time,
frequency, and polarization, especially in the presence of mode coupling. The newly …

The aim of this paper is to provide a review of micromirror array (MMA) technologies (2631
MMA research papers and patents were reviewed for this effort). The performance …

An integrated poly-SiGe-based piezoresistive pressure sensor, which is directly fabricated
above 0.13 μm Cu-back-end CMOS technology, is presented. This represents not only the …

Holography is undoubtedly the ultimate 3D visualization technology, offering true 3D
experience with all the natural depth cues, without the undesirable side-effects of current …

In this paper, we demonstrate the first high-resolution spatial-light-modulator chip with 1
million tilting micromirrors made of monocrystalline silicon on analog high-voltage …

Optical direct-write technology has been studied since the successful development of the
micromirror-based spatial light modulators in the 1990s. It is expected to have advantages …

This work demonstrates, for the first time, the use of poly-SiGe for the fabrication of both
piezoresistive and capacitive pressure sensors at CMOS-compatible temperatures. Despite …

In this paper, we report on the heterogeneous integration of monocrystalline silicon
membranes for the fabrication of large segmented micromirror arrays for adaptive optics …

New developments in digital mirror devices (DMDs) require suspension hinges with a good
damping and high temperature stability. Carbon nanotubes (CNTs) offer these unique …

Temporary protective packaging is a critical enabler to the development of micromirror array
(MMA) module. Herein, aimed at the vertical integration of optical-window-free through …