Surface passivation of germanium using NH3 ambient in RTP for high mobility MOS structure

Passivation of germanium surfaces

S Bilodeau, EI Cooper, H Wu, MC Yang - US Patent 10,290,505, 2019 - Google Patents
US10290505B2 - Passivation of germanium surfaces - Google Patents US10290505B2 -
Passivation of germanium surfaces - Google Patents Passivation of germanium surfaces …
相关文章 所有 4 个版本