Layer‐engineered functional multilayer thin‐film structures and interfaces through atomic and molecular layer deposition
M Heikkinen, R Ghiyasi… - Advanced Materials …, 2024 - Wiley Online Library
Atomic layer deposition (ALD) technology is one of the cornerstones of the modern
microelectronics industry, where it is exploited in the fabrication of high‐quality inorganic …
microelectronics industry, where it is exploited in the fabrication of high‐quality inorganic …
Influence of Annealing on Mechanical Behavior of Alumina-Tantala Nanolaminates
Mechanical properties of thin films are significant for the applicability of nanodevices.
Amorphous Al2O3-Ta2O5 double and triple layers were atomic layer-deposited to the …
Amorphous Al2O3-Ta2O5 double and triple layers were atomic layer-deposited to the …
Transport-property tailored thin films for thermoelectrics through atomic/molecular layer deposition
R Ghiyasi - 2023 - aaltodoc.aalto.fi
Atomic layer deposition (ALD) creates a unique opportunity for effective materials
nanostructuring. In this thesis, ALD, along with its other form, molecular layer deposition …
nanostructuring. In this thesis, ALD, along with its other form, molecular layer deposition …