Process modeling, optimization and characterization of silicon< 100> optical waveguides by anisotropic wet etching
We present a detailed fabrication process of silicon optical waveguide with a depth of 4μm
via simulation and experiment. An anisotropic wet etching using Potassium Hydroxide …
via simulation and experiment. An anisotropic wet etching using Potassium Hydroxide …
Performance of Optical Wavelength Demultiplexer Based on Silicon-on-Insulator (SOI) Microring Resonators (MRRs)
In this paper, we presented the performance analysis of Silicon-on-Insulator (SOI) based,
four channels optical wavelength demultiplexer using microrings. The characterizations are …
four channels optical wavelength demultiplexer using microrings. The characterizations are …