Silicon MEMS inertial sensors evolution over a quarter century
G Langfelder, M Bestetti, M Gadola - Journal of Micromechanics …, 2021 - iopscience.iop.org
Silicon-based microelectromechanical systems (MEMS) inertial sensors have become
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …
ubiquitous, revolutionizing motion sensing, vibration sensing and accurate positioning in …
Frequency-modulated mems gyroscopes: A review
X Ren, X Zhou, S Yu, X Wu, D Xiao - IEEE sensors journal, 2021 - ieeexplore.ieee.org
As a high-precision angular rate sensor, the Frequency-Modulated (FM) gyroscope based
on MEMS craft has attracted more and more attention in recent years, owing to its …
on MEMS craft has attracted more and more attention in recent years, owing to its …
Frequency-modulated MEMS accelerometers for wide dynamic range and ultra-low consumption
G Langfelder, M Bestetti, M Zucchini… - 2019 IEEE …, 2019 - ieeexplore.ieee.org
The purpose of this paper is to review micro-electromechanical system (MEMS) based
frequency-modulated (FM) accelerometers, from both a system and performance standpoint …
frequency-modulated (FM) accelerometers, from both a system and performance standpoint …
Quartz Enhanced Micro Electromechanical Systems Accelerometer for Seismic Monitoring: Field Performance in Volcanic Region.
RD Andajani, M Todorokihara, A Araya… - IEEE Sensors …, 2024 - ieeexplore.ieee.org
This article introduces a novel Quartz micro electromechanical systems (QMEMSs)
accelerometer, providing detailed insights into its design, system architecture, performance …
accelerometer, providing detailed insights into its design, system architecture, performance …
Sub-10 μHz/√Hz Measurement Instrumentation for 140-dB DR Frequency-Modulated MEMS Sensors
C Padovani, M Bestetti, C Valzasina… - IEEE Transactions …, 2022 - ieeexplore.ieee.org
The field of frequency-modulated (FM) microelectromechanical system (MEMS) sensors is
emerging as an alternative to conventional amplitude-modulated (AM) architectures …
emerging as an alternative to conventional amplitude-modulated (AM) architectures …
Miniaturized quadruple mass gyroscopes: challenges and implementation
M Gianollo, V Mastri, V Zega, M Bestetti… - 2021 IEEE …, 2021 - ieeexplore.ieee.org
This work introduces the smallest quadruple mass gyroscope, fabricated with a standard
MEMS process within a 1 mm 2 area. The design highlights the challenges in miniaturizing …
MEMS process within a 1 mm 2 area. The design highlights the challenges in miniaturizing …
A 9 ps DNL/INL/RMS FPGA-Based Sigma Accumulation TDC with Unlimited Dynamic Range for Time-Based Analog Front End Applications
M Todorokihara - 2021 IEEE Sensors, 2021 - ieeexplore.ieee.org
A novel time to digital converter (ΣATDC), inspired by phase sensitive moiré patterns, is
proposed. The ΣATDC overcomes the trade-off between resolution and dynamic range by a …
proposed. The ΣATDC overcomes the trade-off between resolution and dynamic range by a …