[HTML][HTML] Optical, structural and composition properties of silicon nitride films deposited by reactive radio-frequency sputtering, low pressure and plasma-enhanced …

LY Beliaev, E Shkondin, AV Lavrinenko, O Takayama - Thin Solid Films, 2022 - Elsevier
We present a comparative study of optical properties of silicon nitride thin films deposited by
reactive radio-frequency (R-RF) sputtering, low pressure chemical vapor deposition …

Foundry developments toward silicon nitride photonics from visible to the mid-infrared

P Munoz, PWL van Dijk, D Geuzebroek… - IEEE Journal of …, 2019 - ieeexplore.ieee.org
Photonic integration technologies have spread in the past decade by means of foundry
models that mirror the electronic-integrated circuit industry developments of the past century …

Analysis of silicon nitride partial Euler waveguide bends

F Vogelbacher, S Nevlacsil, M Sagmeister, J Kraft… - Optics express, 2019 - opg.optica.org
In this work, we present a detailed analysis of individual loss mechanisms in silicon nitride
partial Euler bends at a wavelength of 850? nm. This structure optimizes the transmission …

Tandem configuration of microrings and arrayed waveguide gratings for a high-resolution and broadband stationary optical spectrometer at 860 nm

Z Zhang, Y Wang, HK Tsang - ACS Photonics, 2021 - ACS Publications
Stationary optical spectrometers with both high spectral resolution and broad bandwidth at
800 nm− 900 nm are needed in the high speed biosensing and bioimaging systems. Here …

Programmable true time delay lines using integrated waveguide meshes

D Pérez-López, E Sánchez… - Journal of Lightwave …, 2018 - opg.optica.org
We analyze and explore the potential that waveguide-mesh-based architectures used in
programmable photonic integrated circuits can be configured to enable true time optical …

Integrated photonic tunable basic units using dual-drive directional couplers

D Pérez-López, AM Gutierrez, E Sánchez… - Optics …, 2019 - opg.optica.org
Photonic integrated circuits based on waveguide meshes and multibeam interferometers
call for large-scale integration of Tunable Basic Units (TBUs) that feature beam splitters and …

Ultracompact 40-channel arrayed waveguide grating on silicon nitride platform at 860 nm

Z Zhang, Y Wang, HK Tsang - IEEE Journal of Quantum …, 2019 - ieeexplore.ieee.org
Arrayed waveguide gratings (AWG) have been widely used as wavelength multiplexers and
demultiplexers in dense wavelength division multiplexing communications. In this letter, we …

Low-loss TeO2-coated Si3N4 waveguides for application in photonic integrated circuits

HC Frankis, KM Kiani, DB Bonneville, C Zhang… - Optics …, 2019 - opg.optica.org
We report on high-quality tellurium oxide waveguides integrated on a low-loss silicon nitride
wafer-scale platform. The waveguides consist of silicon nitride strip features, which are …

Low-loss and ultra-broadband silicon nitride angled MMI polarization splitter/combiner

R Kudalippalliyalil, TE Murphy, KE Grutter - Optics Express, 2020 - opg.optica.org
The property of self-imaging combined with the polarization birefringence of the angled
multimode waveguide is used to design a silicon nitride (SiN) polarization splitter (PS) at λ∼ …

Integrated photonic materials for the mid‐infrared

A Yadav, AM Agarwal - International Journal of Applied Glass …, 2020 - Wiley Online Library
While silicon photonic integrated circuits for the near‐infrared (IR) telecommunication band
have attracted great research interest in the past decade, recent advances offer …