Abstract Space missions face developmental limitations in the endeavor to attenuate
microvibration significantly while aiming to achieve high micropositioning accuracy. To …

In this paper, to improve the robustness and realize the precision positioning as well as
speed control of the servo drive system, an integrated sliding-mode control (ISMC) optimized …

By serially combining two piezoelectrically actuated compliant stages, a dual-stage fast tool
servo (FTS) is developed to greatly enhance the trajectory tracking performance of …

Piezoelectric actuation technology has been widely used in various precise‐oriented fields.
Its notable advantages include high resolution, rapid response speed, output force with high …

The dual-stage actuation effectively extends the dynamic response and tracking accuracy of
conventional fast tool servos (FTS). In this study, a normal-stressed electromagnetic stage is …

This paper presents a magnetically levitated parallel actuated dual-stage (maglev-PAD)
motion system for six-axis precision positioning. This dual-stage motion system consists of a …

Performance of traditional model-based control relies upon accurate modeling. In motion
control of flexible systems, it is desirable to use the reduced-order model for ease of …

With the development of CNC machine tools toward high speed and high precision, the
traditional static design methods can hardly meet the demand. Hence, in this paper, the …

This article proposes a global iterative sliding mode control approach for high-precision
contouring tasks of a flexure-linked biaxial gantry system. For such high-precision …

摘要对于步进扫描投影光刻机, 掩模台和工件台的同步伺服性能将直接影响整机技术指标.
掩模台和工件台是典型的六自由度超精密运动台, 在耦合动力学, 复杂内外部干扰条件下兼顾高 …