Methods and systems for utilizing design data in combination with inspection data
K Zafar, S Kekare, E Chang, A Park, P Rose - US Patent 7,570,796, 2009 - Google Patents
Various methods and systems for utilizing design data in combination with inspection data
are provided. One computer-implemented method for binning defects detected on a wafer …
are provided. One computer-implemented method for binning defects detected on a wafer …
Methods and systems for utilizing design data in combination with inspection data
A Kulkarni, B Duffy, K Maayah, G Rouse - US Patent 7,676,077, 2010 - Google Patents
2007-03-19 Assigned to KLA-TENCOR TECHNOLOGIES CORPORATION reassignment
KLA-TENCOR TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS …
KLA-TENCOR TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS …
Methods and systems for determining a position of inspection data in design data space
A Kulkarni, B Duffy, K Maayah, G Rouse… - US Patent …, 2011 - Google Patents
2007-06-07 Assigned to KLA-TENCOR TECHNOLOGIES CORPORATION reassignment
KLA-TENCOR TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS …
KLA-TENCOR TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS …
Systems and methods for creating inspection recipes
B Duffy, A Kulkarni - US Patent 7,877,722, 2011 - Google Patents
DIE Q2 turing process. The method also includes creating an inspec tion recipe for a second
design using the? rst design and the one or more characteristics of the output acquired for …
design using the? rst design and the one or more characteristics of the output acquired for …
Computer-implemented methods for detecting defects in reticle design data
ZK Saidin, Y Xiong, L Glasser, C Hess… - US Patent …, 2010 - Google Patents
Computer-implemented methods for detecting defects in reticle design data are provided.
One method includes generating a first simulated image illustrating how the reticle design …
One method includes generating a first simulated image illustrating how the reticle design …
Methods, systems, and carrier media for evaluating reticle layout data
G Verma, L Glasser, ME Preil - US Patent 7,689,966, 2010 - Google Patents
US7689966B2 - Methods, systems, and carrier media for evaluating reticle layout data -
Google Patents US7689966B2 - Methods, systems, and carrier media for evaluating reticle …
Google Patents US7689966B2 - Methods, systems, and carrier media for evaluating reticle …
Detecting defects on a wafer
J Lang, K Chen, L Gao, J Huang - US Patent 9,053,527, 2015 - Google Patents
Assigning individuai output in the second raw output to different segments based on the
identified one or more characteristics of the first raw output archased ar: the individual output …
identified one or more characteristics of the first raw output archased ar: the individual output …
Detecting defects on a wafer
J Huang, Y Zhang, S Chen, T Luo, L Gao… - US Patent …, 2014 - Google Patents
US8775101B2 - Detecting defects on a wafer - Google Patents US8775101B2 - Detecting
defects on a wafer - Google Patents Detecting defects on a wafer Download PDF Info Publication …
defects on a wafer - Google Patents Detecting defects on a wafer Download PDF Info Publication …
Methods and systems for detecting defects in a reticle design pattern
SA Kekare, IB Peterson, ME Preil - US Patent 7,769,225, 2010 - Google Patents
Computer-implemented methods and systems for detecting defects in a reticle design
pattern are provided. One computer-implemented method includes acquiring images of a …
pattern are provided. One computer-implemented method includes acquiring images of a …
Methods and systems for utilizing design data in combination with inspection data
K Zafar, S Kekare, E Chang, A Park, P Rose - US Patent 8,923,600, 2014 - Google Patents
2009-08-03 Assigned to KLA-TENCOR TECHNOLOGIES CORPORATION reassignment
KLA-TENCOR TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS …
KLA-TENCOR TECHNOLOGIES CORPORATION ASSIGNMENT OF ASSIGNORS …