A Mameli, JD Parish, T Dogan… - Advanced Materials …, 2022 - Wiley Online Library
Spatial atomic layer deposition (sALD) of p‐type SnO is demonstrated using a novel liquid
ALD precursor, tin (II)‐bis (tert‐amyloxide), Sn (TAA) 2, and H2O as the coreactant in a …