The direct parametrisation method for invariant manifolds is used for model order reduction
of forced-damped mechanical structures subjected to geometric nonlinearities. Nonlinear …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …

Compared to conventional sensors, resonant-based sensors output frequency signals
instead of voltage signals and therefore have greater advantages in terms of accuracy, noise …

A mathematical model of an ultrahigh sensitivity piezoresistive chip of a pressure sensor
with a range from− 0.5 to 0.5 kPa has been developed. The optimum geometrical …

In this study, the drift of microelectromechanical system (MEMS) accelerometers stored at
room temperature for one year is investigated by both finite-element analysis (FEA) …

Magnetometers are ubiquitous in applications covering many aspects of modern life, such
as navigation, smart devices, biomedical systems, geological surveying and aerospace. This …

Quantification and minimisation of energy consumption in resonant MEMS micromirrors is a
key aspect for a proper structural design. In this setting, the quality factor Q of the drive mode …

Complex multi-physics phenomena are peculiar of MEMS. Mechanics plays a major role in
many cases, in prims in inertia MEMS, but also in many other devices like micromirrors …

Designing resonating components as MEMS gyroscopes, micromirrors, and resonators
requires accurate prediction of their nonlinear dynamic response. This ensures avoiding …

In this paper, the basic concepts of the equivalent model, vibration modes, and conduction
mechanisms of MEMS resonators are described. By reviewing the existing representative …