YH Kil, HD Yang, JH Yang, JH Kim, JY Jung… - Journal of the Korean …, 2013 - Springer
A boron doped p-type Ge layer has been grown on an n-type Si (100) wafer (8 inch in
diameter, resistivity= 5∼ 15 Ω· cm) by using. The top surface roughness and the thickness of …