With the rapid commercialization of fifth generation (5G) technology in the world, the market
demand for radio frequency (RF) filters continues to grow. Acoustic wave technology has …

The use of wide bandgap semiconductor thin films as sensing materials for micro-electrical–
mechanical systems (MEMS) sensors has been the subject of much discussion in the …

Over the past five decades, LiNbO3 and LiTaO3 single crystals and thin films have been
studied intensively for their exceptional acoustic, electro‐optical, and pyroelectric and …

This paper presents a 1.2-mm diameter high fill-factor array of 1261 piezoelectric
micromachined ultrasonic transducers (PMUTs) operating at 18.6 MHz in fluid for …

The temperature dependence of ferroelectric properties was investigated for (Al 0.8 Sc 0.2)
N films 9–130 nm thick prepared on (111) Pt/TiO x/SiO 2/Si substrates. The coercive fields (E …

Based on density functional theory, we investigate the ferroelectric and piezoelectric
properties of the AlN/ScN superlattice, consisting of ScN and AlN buckled monolayers …

Ferroelectric PZT-based perovskite thin films are widely studied for fabrication of compact
piezoelectric energy harvesting (EH) power microelectromechanical systems (MEMS) due to …

This paper reports an experimental study of a polyvinylidene fluoride (PVDF) cantilever with
a magnetic mass for piezoelectric and electromagnetic energy harvesting. Due to the low …

Enhancement of piezoelectricity in w-AlN is desired for many devices including resonators
for next-generation wireless communication systems, sensors, and vibrational energy …

Dopants play an important role in improving the piezoelectric stress coefficient (e33) of
aluminum nitride (AlN)-based piezoelectric materials. However, the existing experimental or …