CMOS-integrated aluminum nitride MEMS: A review
Aluminum nitride (AlN) has gained wide interest owing to its high values of elastic modulus,
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …
band gap, dielectric strength, resistivity, thermal conductivity and acoustic velocities …
[HTML][HTML] Effective quality factor tuning mechanisms in micromechanical resonators
Quality factor (Q) is an important property of micro-and nano-electromechanical (MEM/NEM)
resonators that underlie timing references, frequency sources, atomic force microscopes …
resonators that underlie timing references, frequency sources, atomic force microscopes …
MEMS resonators for frequency reference and timing applications
An overview of microelectromechanical systems (MEMS) resonators for frequency reference
and timing applications is presented. The progress made in the past few decades in design …
and timing applications is presented. The progress made in the past few decades in design …
Understanding spontaneous orientation polarization of amorphous organic semiconducting films and its application to devices
Spontaneous orientation polarization (SOP) of amorphous organic semiconducting films has
attracted much attention because of its frequent observation in common organic light …
attracted much attention because of its frequent observation in common organic light …
MEMS post-processed self-assembled electret for vibratory energy harvesters
Electret-based microelectromechanical system (MEMS) vibratory energy harvesting is a key
technology for converting the mechanical energy of environmental vibrations into electricity …
technology for converting the mechanical energy of environmental vibrations into electricity …
Thermomechanical-noise-limited capacitive transduction of encapsulated MEM resonators
JML Miller, NE Bousse, DB Heinz… - Journal of …, 2019 - ieeexplore.ieee.org
The thermomechanical motion imposes the fundamental noise limit in room-temperature
resonant sensors and oscillators. Due to the inherently low sensitivity of capacitive …
resonant sensors and oscillators. Due to the inherently low sensitivity of capacitive …
Load-induced dynamical transitions at graphene interfaces
The structural superlubricity (SSL), a state of near-zero friction between two contacted solid
surfaces, has been attracting rapidly increasing research interest since it was realized in …
surfaces, has been attracting rapidly increasing research interest since it was realized in …
A CMOS-integrated MEMS platform for frequency stable resonators-Part I: Fabrication, implementation, and characterization
This paper introduces the comprehensive design concepts, procedure, and post-process
flow of a robust manufacturing platform for complementary metal-oxide-semiconductor …
flow of a robust manufacturing platform for complementary metal-oxide-semiconductor …
A low impedance CMOS-MEMS capacitive resonator based on metal-insulator-metal (MIM) capacitor structure
This letter presents the first nano-gap microelectromechanical systems (MEMS) resonator
based on a Metal-Insulator-Metal (MIM) capacitor structure in standard CMOS. We develop …
based on a Metal-Insulator-Metal (MIM) capacitor structure in standard CMOS. We develop …
Resonant Inertial Mass Sensing for VOCs—CMOS-Compatible SoC Integration Advantages and Challenges: A Review
Volatile organic compounds (VOCs) have gained the biomedical community's attention
given their relevance in exhaled human breath analysis for noninvasive disease diagnosis …
given their relevance in exhaled human breath analysis for noninvasive disease diagnosis …