Atomic layer deposition of thin films: from a chemistry perspective

J Li, G Chai, X Wang - International Journal of Extreme …, 2023 - iopscience.iop.org
Atomic layer deposition (ALD) has become an indispensable thin-film technology in the
contemporary microelectronics industry. The unique self-limited layer-by-layer growth …

Recent progress on group III nitride nanostructure-based gas sensors

N Sharma, V Pandey, A Gupta, ST Tan… - Journal of Materials …, 2022 - pubs.rsc.org
Group III nitrides are attracting considerable attention as promising materials for a variety of
applications due to their wide bandgap, high electron mobility, high thermal stability, and …

Investigation and review of the thermal, mechanical, electrical, optical, and structural properties of atomic layer deposited high-k dielectrics: Beryllium oxide, aluminum …

JT Gaskins, PE Hopkins, DR Merrill… - ECS Journal of Solid …, 2017 - iopscience.iop.org
Atomic layer deposited (ALD) high-dielectric-constant (high-k) materials have found
extensive applications in a variety of electronic, optical, optoelectronic, and photovoltaic …

High-performance AlGaN double channel HEMTs with improved drain current density and high breakdown voltage

Y Zhang, Y Li, J Wang, Y Shen, L Du, Y Li… - Nanoscale Research …, 2020 - Springer
In this work, AlGaN double channel heterostructure is proposed and grown by metal organic
chemical vapor deposition (MOCVD), and high-performance AlGaN double channel high …

Toxicity of superparamagnetic iron oxide nanoparticles: research strategies and implications for nanomedicine

L Li, LL Jiang, Y Zeng, G Liu - Chinese Physics B, 2013 - iopscience.iop.org
Superparamagnetic iron oxide nanoparticles (SPIONs) are one of the most versatile and
safe nanoparticles in a wide variety of biomedical applications. In the past decades …

PEALD-grown crystalline AlN films on Si (100) with sharp interface and good uniformity

S Liu, M Peng, C Hou, Y He, M Li, X Zheng - Nanoscale Research Letters, 2017 - Springer
Aluminum nitride (AlN) thin films were deposited on Si (100) substrates by using plasma-
enhanced atomic layer deposition method (PEALD). Optimal PEALD parameters for AlN …

Beyond the highs and lows: A perspective on the future of dielectrics research for nanoelectronic devices

M Jenkins, DZ Austin, JF Conley, J Fan… - ECS Journal of Solid …, 2019 - iopscience.iop.org
High-dielectric constant (high-k) gate oxides and low-dielectric constant (low-k) interlayer
dielectrics (ILD) have dominated the nanoelectronic materials research scene over the past …

Suppression of current collapse in enhancement mode GaN-based HEMTs using an AlGaN/GaN/AlGaN double heterostructure

SY Ho, CH Lee, AJ Tzou, HC Kuo… - … on Electron Devices, 2017 - ieeexplore.ieee.org
Current collapse is a phenomenon that increases the channel resistance during the
switching process when the high gate and drain voltages are applied. The effect can be …

Demonstration of vertically-ordered h-BN/AlGaN/GaN metal-insulator-semiconductor high-electron-mobility transistors on Si substrate

M Whiteside, S Arulkumaran, GI Ng - Materials Science and Engineering: B, 2021 - Elsevier
AlGaN/GaN metal–insulator-semiconductor high-electron-mobility transistors (MISHEMTs)
have been demonstrated with 22 nm thick vertically ordered (VO) h-BN by high-power …

[HTML][HTML] Isotropic atomic layer etching of GaN using SF6 plasma and Al (CH3) 3

NJ Chittock, Y Shu, SD Elliott, H Knoops… - Journal of Applied …, 2023 - pubs.aip.org
GaN is an enabling material for light emitting diodes, advanced radio frequency, and power
semiconductor devices. However, fabrication of GaN devices often relies on harsh etch …