Assessment of carbon contamination in MoS2 grown by MOCVD using Mo (CO) 6 and (CH3-CH2) 2S...

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Two-Step Growth of Uniform Monolayer MoS2 Nanosheets by Metal–Organic Chemical Vapor Deposition

S Chowdhury, A Roy, C Liu, MH Alam, R Ghosh… - ACS …, 2021 - ACS Publications
To achieve large area growth of transition metal dichalcogenides of uniform monolayer
thickness, we demonstrate metal–organic chemical vapor deposition (MOCVD) growth …
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