Laser surface texturing of ceramics and ceramic composite materials–A review

A De Zanet, V Casalegno, M Salvo - Ceramics International, 2021 - Elsevier
The surface texturing of ceramics is generally performed through acid-based etching and
machining; however, laser texturing may be considered as a more precise, reproducible and …

Material removal characteristics of single-crystal 4H-SiC based on varied-load nanoscratch tests

K Tang, W Ou, C Mao, J Liang, M Zhang… - Chinese Journal of …, 2023 - Springer
Single-crystal silicon carbide (SiC) has been widely applied in the military and civil fields
because of its excellent physical and chemical properties. However, as is typical in hard-to …

[HTML][HTML] Application of femtosecond laser micromachining in silicon carbide deep etching for fabricating sensitive diaphragm of high temperature pressure sensor

Y Zhao, YL Zhao, LK Wang - Sensors and Actuators A: Physical, 2020 - Elsevier
Pressure sensors that can work over 500℃ are widely needed in aerospace and
petrochemical fields, while silicon based high temperature pressure sensors are difficult to …

A review of ultra-short pulse laser micromachining of wide bandgap semiconductor materials: SiC and GaN

K Jiang, P Zhang, S Song, T Sun, Y Chen, H Shi… - Materials Science in …, 2024 - Elsevier
Wide bandgap (WBG) materials have excellent semiconductor and physicochemical
properties and are emerging materials. Silicon carbide (SiC) and gallium nitride (GaN), two …

Materials removal mechanism of single crystalline SiC with laser-induced periodic surface structures (LIPSS)

P Chen, Z Chi, R Pan, F Qin, P Qiu, J Huang… - Journal of Materials …, 2023 - Elsevier
The surface modification by ultra-fast laser could regulate the mechanical properties of hard
and brittle materials. Since silicon carbide (SiC) is too hard to be machined with acceptable …

Femtosecond laser surface modification coupling with surface metallurgical reaction promotes surface plasticity of SiC

Y Huang, Y Zhou, J Li, F Zhu - Journal of Materials Processing Technology, 2023 - Elsevier
To improve the machinability of silicon carbide (SiC) during machining, promoting surface
plasticity is a classical strategy. In this study, it aimed to promote the surface plasticity of SiC …

Study of damage mechanism on single crystal 4H-SiC surface layer by picosecond laser modification (PLM)

H Liu, Z Li, P Zhang, D Zuo, W Xie - Applied Surface Science, 2024 - Elsevier
The stable structure, high hardness, and brittleness of single-crystal 4H-SiC present
challenges in achieving efficient and damage-free polishing processing. Ultra-short pulsed …

[HTML][HTML] The ablation behavior and modification mechanism of SiC under different laser energy

Z Li, M Jin, H Liu, D Zuo, W Xie - Journal of Materials Research and …, 2024 - Elsevier
The laser modification pretreatment method is an effective way to address the machining
difficulties of silicon carbide (SiC), a typical hard-to-machine material. Therefore, the ablation …

Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser

J Zheng, J Huang, S Xu - Optics and Lasers in Engineering, 2020 - Elsevier
Hybridly polarized beam is a new type of vector beam different from conventional cylindrical
vector beam. In our work, we present a simple and effective method to generate hybridly …

One-step fabrication of fine surfaces via femtosecond laser on sliced SiC

G Chen, J Li, H Luo, Y Zhou, Q Peng, X Xie… - Materials Science in …, 2021 - Elsevier
A one-step, facile approach of femtosecond laser polishing for achieving fine surface in
sliced SiC is reported. The effect of wavelength and pulse number on formation mechanism …