M Ma, G Lin, J Xu, H Qian, R Shen… - IEEE Electron …, 2024 - ieeexplore.ieee.org
We have developed and fabricated 1T1C antiferroelectric RAM (AFeRAM) with InGaZnO
(IGZO)/InO dual-channel FET and antiferroelectric (AFE) ZrO 2 capacitor for monolithic 3D …